메틸삼염화규소로부터 탄화규소 침착의 Pulse-CVI에 대한수치모사 연구Studies on the Mathematical Modelling of the Pulse-CVI for the Infiltration of Siliconcarbide from Methyltrichlorosilane
Studies on the Mathematical Modelling of the Pulse-CVI for the Infiltration of Siliconcarbide from Methyltrichlorosilane
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초록
본 연구에서는 펄스-CVI (Chemical Vapor Infiltration)에 의해 탄화규소/탄소 복합재료를 제조하는 공정에 대한 수치모사가 행해졌다. 각 펄스가 가스 주입시간, 반응시간, 배출시간으로 구성될 때, 반응시간과 배출시간의 영향이 관찰되었다. 또한 반응가스 농도와 압력의 영향이 연구되었다. 탄소프리폼에의 탄화규소의 균일한 침착과 반응시간 단축을 위한 펄스-CVI공정의 이점이 확인되었다.
Abstract
In this research, the mathematical modelling of the pulse-CVI (Chemical Vapor Infiltration) for the preparation of siliconcarbide/carbon composite. Each pulse consists with the gas injection time, the reaction time and the evacuation time. Effects of the reaction time and the evacuation time were studied. Additionally, the effects of the reactant concentration and the pressure were observed. The benefits of the pulse-CVI such as the uniform infiltration of siliconcarbide into the carbon preform and the short reaction time were certified.
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