Study of Al2O3/ZrO2 (5 nm/20nm) Nanolaminate Composite
3
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
A nanolaminate consisting of alternate layers of aluminium oxide (Al2O3) (5 nm) and zirconium oxide (ZrO2) (20 nm) was deposited at an optimized oxygen partial pressure of 3×10-2 mbar by pulsed laser deposition. The nanolaminate film was analysed using high temperature X-ray diffraction (HTXRD) to study phase transition and thermal expansion behaviour. The surface morphology was investigated using field emission scanning electron microscopy (FE-SEM). High temperature X-ray diffraction indicated the crystallization temperature of tetragonal zirconia in the Al2O3/ZrO2 multilayer -film was 873 K. The mean linear thermal expansion coefficient of tetragonal ZrO2 was 4.7×10-6 K-1 along a axis, while it was 13.68×10-6 K-1 along c axis in the temperature range 873-1373 K. The alumina was in amorphous nature. The FESEM studies showed the formation of uniform crystallites of zirconia with dense surface.
Abstract
A nanolaminate consisting of alternate layers of aluminium oxide (Al2O3) (5 nm) and zirconium oxide (ZrO2) (20 nm) was deposited at an optimized oxygen partial pressure of 3×10-2 mbar by pulsed laser deposition. The nanolaminate film was analysed using high temperature X-ray diffraction (HTXRD) to study phase transition and thermal expansion behaviour. The surface morphology was investigated using field emission scanning electron microscopy (FE-SEM). High temperature X-ray diffraction indicated the crystallization temperature of tetragonal zirconia in the Al2O3/ZrO2 multilayer -film was 873 K. The mean linear thermal expansion coefficient of tetragonal ZrO2 was 4.7×10-6 K-1 along a axis, while it was 13.68×10-6 K-1 along c axis in the temperature range 873-1373 K. The alumina was in amorphous nature. The FESEM studies showed the formation of uniform crystallites of zirconia with dense surface.
참고문헌 (24)
- Garvie, R. C., "Stabilization of the tetragonal structure in zirconia microcrystals", Journal of Physical Chemistry, 82(2), pp.218~224 (1978)
- Balakrishnan, G., "Influence of oxygen partial pressure on the properties of pulsed laser deposited nanocrystalline zirconia thin films", Applied Surface Science, 257(20), pp.8506~8510 (2011)
- Andritschky, M., "Thermal stability of zirconia", alumina thin coatings produced by magnetron sputtering, 1997, pp.94(1), 144~148
- Aita, C. R., "Thermodynamics of tetragonal zirconia formation in a nanolaminate film", Journal of Applied Physics, 79(2), pp.1176~1178 (1996)
- Teixeira, V., "Effects of deposition temperature and thermal cycling on residual stress state in zirconia-based thermal barrier coatings", Surface and Coating Technology, 120(3), pp.103~111 (1999)
- Gao, P., "Study of ZrO2", Al2O3 multilayers, 2002, pp.64(3), 267~273
- Garvie, R. C., "Ceramic steel", Nature, 258, pp.703~704 (1975)
- Dakskobler, A., "The preparation and properties of Al2O3-ZrO2 composites with corrugated microstructures", Journal of European Ceramic Society, 24(12), pp.3351~3357 (2004)
- Scanlan, M., "Tetragonal zirconia growth by nanolaminate formation", Applied Physics Letters, 64(26), pp.3548~3550 (1994)
- Cao, X.Q., "Ceramic materials for thermal barrier coatings", Journal of European Ceramic Society, 24(1), pp.1~10 (2004)
- Bjormander, C., "CVD deposition and characterization of coloured Al2O3", ZrO2 multilayers, 2006, pp.201(7), 4032~4036
- Tamura, M., "Multilayered thermal barrier coating for land-based gas turbines", Journal of Thermal Spray Technology, 8(1), pp.68~72 (1999)
- Chrisey, D. B., "Pulsed Laser Deposition of Thin Films" (1994), Wiley
- Trinh, D. H., "Direct current magnetron sputtering deposition of nanocomposite alumina-zirconia thin films", Thin Solid Films, 516(23), pp.8352~8358 (2008)
- Zhao, C., "In situ crystallisation in ZrO2 thin films during high temperature Xray diffraction", Microelectronics Reliability, 41, pp.995~998 (2001)
- Balakrishnan, G., "Characterization of Al2O3", ZrO2 nano multilayer thin films prepared by pulsed laser deposition, 2012, pp.133(1), 299~303
- Djurado, E., "Crystallite Size Effect on the Tetragonal-Monoclinic Transition of Undoped Nanocrystalline Zirconia Studied by XRD and Raman Spectrometry", Journal of Solid State Chemistry, 149(2), pp.399~407 (2000)
- Lange, F. F., "Transformation toughening", Journal of Materials Science, 17(1), pp.225~234 (1982)
- Clemens, B. M., "Structure and strength of multilayers", MRS Bulletin, 24(2), pp.20~26 (1999)
- Teixeira, V., "Deposition of composite and nanolaminate ceramic coatings by sputtering", Vacuum, 67(3), pp.477~483 (2002)
- Aita, C. R., "Zirconia-metal (Al, Y, Ti) oxide nanolaminate films", Surface and Coating Technology, 188, pp.179~185 (2004)
- Aita, C. R., "Reactive sputter deposition of metal oxide nanolaminates", Journal of Physics: Condensed Matter, 20(26), pp.264006~ (2008)
- Barshilia, H. C., "Stabilization of tetragonal and cubic phases of ZrO2 in pulsed sputter deposited ZrO2", Al2O3 and ZrO2, Journal of Applied Physics, pp.2008, 104[DOI]
- Schofield, M. A., "Transmission electron microscopy study of zirconiaalumina nanolaminates grown by reactive sputters deposition. Part I: zirconia nanocrystallite growth morphology", Thin Solid Films, 326(1), pp.106~116 (1998)