방전플라즈마 소결법을 이용한 ZnS-SiO₂ 복합재료의 제조와 기계적 특성
Fabrication of ZnS-SiO₂ Composite and its Mechanical Properties
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ZnS-SiO₂ composite is normally used for sputtering target. In recent years, high sputtering powerfor higher deposition rate often causes crack formation of the target. Therefore the target material is required thatthe sintered target material should have high crack resistance, excellent strength and a homogeneous micro-structure with high sintered density. In this study, raw ZnS and ZnS-SiO2 powders prepared by a 3-D mixer or highenergy ball-milling were successfully densified by spark plasma sintering, the effective densification method offracture (IF) method. Due to the effect of crack deflection by the residual stress occurred by the second phase offine SiO₂, the hardness and fracture toughness reached to 3.031 GPa and 1.014 MPa.m1/2, respectively.
Abstract
ZnS-SiO₂ composite is normally used for sputtering target. In recent years, high sputtering powerfor higher deposition rate often causes crack formation of the target. Therefore the target material is required thatthe sintered target material should have high crack resistance, excellent strength and a homogeneous micro-structure with high sintered density. In this study, raw ZnS and ZnS-SiO2 powders prepared by a 3-D mixer or highenergy ball-milling were successfully densified by spark plasma sintering, the effective densification method offracture (IF) method. Due to the effect of crack deflection by the residual stress occurred by the second phase offine SiO₂, the hardness and fracture toughness reached to 3.031 GPa and 1.014 MPa.m1/2, respectively.
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