방전 플라즈마 소결에 의한 Ge2Sb2Te5 스퍼터링 타겟 제조 및 특성
Synthesis and Properties of a Ge2Sb2Te5 Sputtering for Use as a Target by Spark Plasma Sintering
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In this study, we report the sintering behavior and properties of a Ge2Sb2Te5 alloy powders for use as asputtering target by spark plasma sintering. The effect of various sintering parameters, such as pressure, temperature andtime, on the density and hardness of the target has been investigated in detail. Structural characterization was performedby scanning electron microscopy and X-ray diffraction. Hardness and thermal properties were measured by differentialscanning calorimetry and micro-vickers hardness tester. The density and hardness of the sintered Ge2Sb2Te5 materialswere 5.8976~6.3687 g/cm3 and 32~75 Hv, respectively.
Abstract
In this study, we report the sintering behavior and properties of a Ge2Sb2Te5 alloy powders for use as asputtering target by spark plasma sintering. The effect of various sintering parameters, such as pressure, temperature andtime, on the density and hardness of the target has been investigated in detail. Structural characterization was performedby scanning electron microscopy and X-ray diffraction. Hardness and thermal properties were measured by differentialscanning calorimetry and micro-vickers hardness tester. The density and hardness of the sintered Ge2Sb2Te5 materialswere 5.8976~6.3687 g/cm3 and 32~75 Hv, respectively.
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