Kinetic Spray 공정으로 제조된 Nb 코팅 소재의 미세조직 및 물성에 미치는 열간 등압 성형(HIP)의 영향
Effect of Hot Isostatic Pressing on the Microstructure and Properties of Kinetic Sprayed Nb Coating Material
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Niobium is one of the most important and rarest metals, and is used in the electronic and energy industries. However, it’s extremely high melting point and oxygen affinity limits the manufacture of Nb coating materials. Here, a Nb coating material is manufactured using a kinetic spray process followed by hot isotactic pressing to improve its properties. OM (optical microscope), XRD (X-ray diffraction), SEM (scanning electron microscopy), and Vickers hardness and EPMA (electron probe micro analyzer) tests are employed to investigate the macroscopic properties of the manufactured Nb materials. The powder used to manufacture the material has angular-shaped particles with an average particle size of 23.8 μm. The porosity and hardness of the manufactured Nb material are 0.18% and 221 Hv, respectively. Additional HIP is applied to the manufactured Nb material for 4 h under an Ar atmosphere after which the porosity decreases to 0.08% and the hardness increases to 253 Hv. Phase analysis after the HIP shows the presence of only pure Nb. The study also discusses the possibility of using the manufactured Nb material as a sputtering target.
Abstract
Niobium is one of the most important and rarest metals, and is used in the electronic and energy industries. However, it’s extremely high melting point and oxygen affinity limits the manufacture of Nb coating materials. Here, a Nb coating material is manufactured using a kinetic spray process followed by hot isotactic pressing to improve its properties. OM (optical microscope), XRD (X-ray diffraction), SEM (scanning electron microscopy), and Vickers hardness and EPMA (electron probe micro analyzer) tests are employed to investigate the macroscopic properties of the manufactured Nb materials. The powder used to manufacture the material has angular-shaped particles with an average particle size of 23.8 μm. The porosity and hardness of the manufactured Nb material are 0.18% and 221 Hv, respectively. Additional HIP is applied to the manufactured Nb material for 4 h under an Ar atmosphere after which the porosity decreases to 0.08% and the hardness increases to 253 Hv. Phase analysis after the HIP shows the presence of only pure Nb. The study also discusses the possibility of using the manufactured Nb material as a sputtering target.
참고문헌 (19)
- A. B. Macintosh, , J. Inst. Met., 85, pp.367~ (1957)
- G. Gauje, , Rev. Phys. Appl., 5, pp.1484~ (1970)
- F. J. Cadieu, , Inst. Phys. Conf. Ser., 39, pp.642~ (1978)
- J. E. Kunzler, , Phys. Rev. Lett., 6, pp.89~ (1961)
- K. Mendelssohn, , Proc. Phys. Soc., 63, pp.2~ (1950)
- M. Bidault, , Rev. Phys. Appl., 5, pp.505~ (1970)
- D. C. Carter, , 51st Annual Technical Conference, pp.380~ (2008), Society of Vacuum Coaters
- J. W. Lim, , Surf. Coat. Technol., 201, pp.1899~ (2006)
- J. Sarkar, , Thin Solid Films, 517, pp.1970~ (2009)
- M. Moriyama, , Mater. Trans., 46, pp.1036~ (2005)
- J. K. Kardokus, "United States of America, US6645427 B1", ~ (2003)
- C. F. Lo, , J. Eelectro. Mater., 34, pp.1468~ (2005)
- A. Parapin, "Cold spray technology", pp.49~ (2001), Elsevier
- T. H. V. Steenkiste, , Key Eng. Mater., 197, pp.59~ (2001)
- H. J. Kim, , J. Weld. Join., 20, pp.459~ (2006)
- J. Voyer, , 2003 International Thermal Spray Conference, pp.71~ (2003), ASM International
- 최병철, "스퍼터링 타겟용 저온 분사 Cu-15 at.%Ga 코팅 소재의 특성에 미치는 열처리 분위기의 영향", 한국분말야금학회지, 18(6), pp.552~561 (2011), 한국분말야금학회
- 유지상, "저온 분사 공정으로 제조된 티타늄 코팅층의 치밀화에 미치는 열처리 분위기의 영향", 한국분말야금학회지, 19(2), pp.110~116 (2012), 한국분말야금학회[DOI]
- Jin-Hyeon Cho, "Manufacture and Properties of Cold Spray Deposited Large Thickness Cu Coating Material for Sputtering Target", Metals and Materials International, 17(1), pp.157~166 (2011), 대한금속·재료학회