Laser Microfabrication for Silicon Restrictor
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The restrictor, which is a fluid channel from a reservoir to a chamber inside a thermal micro actu-ator, has been fabricated using ArF and KrF excimer lasers, Diode-Pumped Solid State Lasers (DPSL) and fem-tosecond lasers for a feasibility study. A numerical model of fluid dynamics for the actuator chamber and restrictorfluid refill through the restrictor from a reservoir. Since an optimized and well-fabricated restrictor is important fora high frequency actuator, some special beam delivery setups and post processing techniques have beenresearched and developed. The effects of variations of the restrictor length, diameter, and tapered shapes are sim-ulated and the results are analyzed to determine the optimal design. The numerical results of droplet velocity andactuators having tapered restrictors show better high frequency characteristics than those having a cylindricalshape without any notable decrease of droplet volume. The laser-fabricated restrictors demonstrate initial fea-sibility for the laser direct ablation technique although more development is required.
Abstract
The restrictor, which is a fluid channel from a reservoir to a chamber inside a thermal micro actu-ator, has been fabricated using ArF and KrF excimer lasers, Diode-Pumped Solid State Lasers (DPSL) and fem-tosecond lasers for a feasibility study. A numerical model of fluid dynamics for the actuator chamber and restrictorfluid refill through the restrictor from a reservoir. Since an optimized and well-fabricated restrictor is important fora high frequency actuator, some special beam delivery setups and post processing techniques have beenresearched and developed. The effects of variations of the restrictor length, diameter, and tapered shapes are sim-ulated and the results are analyzed to determine the optimal design. The numerical results of droplet velocity andactuators having tapered restrictors show better high frequency characteristics than those having a cylindricalshape without any notable decrease of droplet volume. The laser-fabricated restrictors demonstrate initial fea-sibility for the laser direct ablation technique although more development is required.
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