대전방지용 Al2O3-SiC 복합세라믹 소결체의 제조 및 특성
Fabrication and Characterisitics of Al2O3-SiC Ceramic Composites for Electrostatic Discharge Safe Components
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Al2O3-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al2O3-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostaticdischarge- safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.
Abstract
Al2O3-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al2O3-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostaticdischarge- safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.
참고문헌 (26)
- 김대민, "Plasma Resistances of Yttria Deposited by EB-PVD Method", 한국세라믹학회지, 45(11), pp.707~712 (2008), 한국세라믹학회
- 김경범, "불소계 플라즈마에 노출된 YAG 세라믹스의 식각거동 및 XPS 분석", 한국세라믹학회지, 46(5), pp.456~461 (2009), 한국세라믹학회
- 이현권, "내플라즈마성 알루미나 세라믹스 제조 공정", 한국세라믹학회지, 46(4), pp.385~391 (2009), 한국세라믹학회
- 김대민, "Microstructural Changes of the Al2O3 Ceramics during the Exposure to Fluorine Plasma", 한국세라믹학회지, 45(7), pp.405~410 (2008), 한국세라믹학회
- M. Mitomo, , J. Mater. Sci. Lett., 10, pp.83~ (1990)
- J. Iwasawa, , J. Am. Ceram. Soc., 90, pp.2327~ (2007)[DOI]
- 정종혁, "청정환경용 정전기 제거장치 개발", 한국산학기술학회논문지, 19(1), pp.603~608 (2018), 한국산학기술학회[DOI]
- O.H. Kwon, "USA, US 8516857", ~ (2013)
- C.C. Anya, , J. Mater. Sci., 34, pp.5557~ (1999)[DOI]
- Y.K. Jeong, , J. Am. Ceram. Soc., 82, pp.3609~ (1999)
- C.C. Anya, , J. Eur. Ceram. Soc., 17, pp.565~ (1997)[DOI]
- S. Gustafsson, , Ceram. Int., 34, pp.1609~ (2008)[DOI]
- H.Z. Wang, , Ceram. Int., 26, pp.391~ (2000)[DOI]
- H. Reveron, , J. Eur. Ceram. Soc., 30, pp.1351~ (2010)[DOI]
- A. Sawaguchi, , J. Ceram. Soc. Jpn., 99, pp.523~ (1991)[DOI]
- M. Parchoviansky, , Ceram. Int., 40, pp.14421~ (2014)[DOI]
- J. Sedlacek, , Mater. Lett., 65, pp.2462~ (2011)[DOI]
- A. Borrell, , Mater. Sci. Eng., 534, pp.693~ (2012)[DOI]
- C.E. Borsa, , J. Eur. Ceram. Soc., 19, pp.615~ (1999)[DOI]
- S. Rasouli, , Ceram. Int., 39, pp.3931~ (2013)[DOI]
- J.Y. Kim, , J. Ceram. Soc. Jpn., 105, pp.837~ (1997)[DOI]
- N. Hidaka, "Colloidal ceramic processing of Nano-,micro-, and macro-particulate systems", pp.101~ (2012), Wiley & Sons, Inc.
- V. Heera, , Appl. Surf. Sci., 184, pp.307~ (2001)[DOI]
- A. Sawaguch, , J. Am. Ceram. Soc., 74, pp.1142~ (1991)[DOI]
- 장미란, "Plasma Resistance and Etch Mechanism of High Purity SiC under Fluorocarbon Plasma", 한국세라믹학회지, 49(4), pp.328~332 (2012), 한국세라믹학회[DOI]
- C.P. Dogan, , Wear, 250, pp.256~ (2001)[DOI]