전기도금법으로 제조한 Ni 박막과 Ni-Al2O3 복합박막의 기계적 성질
Mechanical Properties of Ni Films and Ni-Al2O3 Composite Films Fabricated by Electroplating
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도금전류밀도에 따른 Ni 박막과 Ni-Al2O3 복합박막의 항복강도, 파괴 연신율 및 Ni-Al2O3 복합박막내 Al2O3 함유량을 분석하였다. 5∼20 mA/cm2로 형성한 Ni-Al2O3 내 Al2O3 함유량은 11.48∼11.64 vol%로 거의 일정하였으나, 도금전류밀도가 30 mA/cm2로 증가함에 따라 Al2O3 함유량이 8.41 vol%로 감소하였다. Ni-Al2O3 복합박막은 모두 Ni 박막보다 높은 항복강도를 나타내었으며, 특히 5 mA/cm2로 도금한 Ni-Al2O3의 항복강도는 Ni에 비해 50% 증가하였다. 도금전류밀도가 증가함에 따라 Ni 박막과 Ni-Al2O3 복합박막의 파괴 연신율이 감소하였다. 5 mA/cm2에서 도금한 Ni-Al2O3 복합박막이 다른 전류밀도에서 형성한 복합박막에 비해 Al2O3가 균일하게 분산되어 있으며 가장 높은 항복강도와 파괴 연신율을 나타내었다.
Abstract
Characteristics of electroplated Ni films and Ni-AlO composite films, such as yield strength, fracture elongation, and AlO content, were evaluated as a function of electroplating current density. AlO content was 11.48~11.64 vol% for Ni-AlO composite films electroplated at 5~20 mA/cm, and decreased to 8.41 vol% at 30 mA/cm. Ni-AlO possessed yield strengths higher than those of Ni films. Especially, Ni-AlO fabricated at 5 mA/cm exhibited 50% improved yield strength. Fracture elongations of Ni and Ni-AlO decreased with increasing the electroplating current density. Ni-AlO electroplated at 5 mA/cm exhibited more uniform dispersion of AlO and higher yield strength and larger fracture elongation than the composite films processed at other current densities.
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