하이브리드 코팅시스템에 의해 제조된 Mo-Si-N 박막의 미세구조 및 기계적 특성연구

Abstract

In this work, comparative studies on microstructure and mechanical properties between Mo2N and Mo-Si-N coatings were conducted. Ternary Mo-Si-N coatings were deposited on AISI D2 steel substrates by a hybrid method, where AIP technique was combined with a magnetron sputtering technique. Instrumental analyses of XRD, HRTEM, and XPS revealed that the Mo-Si-N coatings must be a composite consisting of fine Mo2N crystallites and amorphous Si3N4. The hardness value of Mo-Si-N coatings significantly increased from 22 GPa of Mo2N coatings to about 37 GPa with Si content of 10 at.% due to the refinement of Mo2N crystallites and the composite microstructure characteristics. The average friction coefficient of the Mo-Si-N coatings gradually decreased from 0.65 to 0.4 with increasing Si content up to 15 at.%. The effects of Si content on microstructure and mechanical properties of Mo-N coatings were systematically investigated.