기-액 상변화 열전달식 고온 히터 플레이트의 작동 특성과성능에 관한 연구
A Study on the Heat Transfer Characteristics and Performance of the High Temperature Range Heater Plate Using Liquid-Vapor Phase Change Heat Transfer
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The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfermechanism is performed. For the experiment, the heater plate which is consist of stainless steel container,working fluid and electrical heater is designed, manufactured and tested at the range of 600 to 850oC. Theresults showed that the phase change type heater plate was much more uniform and stable temperature onthe heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformitycompared with 230m m.
Abstract
The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container,working fluid and electrical heater is designed, manufactured and tested at the range of 600 to 850oC. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230m m.
참고문헌 (11)
- D. H. Choi, , J. KSME B, 40, pp.39~ (2000)
- T. J. Mountziaris, , J. Eletrochemical Soc, 138, pp.2426~ (1991)
- R. Mucciato, , Crystal Growth, 221, pp.758~ (2000)
- T. Bergunde, , J. Crystal Growth, 180, pp.660~ (1997)
- 이윤용, "반도체 표면처리공정용 대면적 히터 플레이트의 열전달 특성에 관한 연구", 한국표면공학회지, 43(6), pp.309~314 (2010), 한국표면공학회
- J. S. Park, , Proc. KSME, pp.3165~ (2007)
- 이정훈, "Susceptor design by numerical analysis in horizontal CVD reactor", 한국결정성장학회지, 15(4), pp.135~140 (2005), 한국결정성장학회
- S. Y. Lee, , Proc. KSME, pp.261~ (2000)
- 박용환, "초정밀 가열판의 온도 균질화를 위한 새로운 설계방법", 대한기계학회논문집 B, 27(11), pp.1525~ (2003), 대한기계학회
- H. S. Hong, , J. of KSHT, 22, pp.162~ (2009)
- P. D. Dunn, "Heat pipes", pp.107~ (1994), Pergamon Press