본문 바로가기
KERD
논문KCI 등재

다구찌 강건 설계를 통한 자장 여과 아크 소스로 증착된 사면체 비정질 탄소막의 최적화

Optimization of tetrahedral amorphous carbon (ta-C) film deposited with filtered cathodic vacuum arc through Taguchi robust design

김지수|김종국|장영준|류호준|곽승윤
한국표면공학회 (The Korean Society of Surface Science and Engineering)|2021.04|한국표면공학회지 (Journal of Surface Science and Engineering)|제54권 제2호|pp. 53-61

1

조회

0

다운로드

3

인용

0

참고문헌

키워드

Taguchi robust designFiltered cathodic vacuum arc (FCVA)Tetrahedral amorphous carbon (ta-C)Diamond like carbon (DLC)
주제분류기계공학

초록

The properties of tetrahedral amorphous Carbon (ta-C) film can be determined by multiple parameters and comprehensive effects of those parameters during a deposition process with filtered cathodic vacuum arc (FCVA). In this study, Taguchi method was adopted to design the optimized FCVA deposition process of ta-C for improving deposition efficiency and mechanical properties of the deposited ta-C thin film. The influence and contribution of variables, such as arc current, substrate bias voltage, frequency, and duty cycle, on the properties of ta-C were investigated in terms of deposition efficiency and mechanical properties. It was revealed that the deposition rate was linearly increased following the increasing arc current (around 10 nm/min @ 60 A and 17 nm/min @ 100A). The hardness and ID/IG showed a correlation with substrate bias voltage (over 30 GPa @ 50 V and under 30 GPa @ 250 V). The scratch tests were conducted to specify the effect of each parameter on the resistance to plastic deformation of films. The analysis on variances showed that the arc current and substrate bias voltage were the most effective controlling parameters influencing properties of ta-C films. The optimized parameters were extracted for the target applications in various industrial fields.

Abstract

The properties of tetrahedral amorphous Carbon (ta-C) film can be determined by multiple parameters and comprehensive effects of those parameters during a deposition process with filtered cathodic vacuum arc (FCVA). In this study, Taguchi method was adopted to design the optimized FCVA deposition process of ta-C for improving deposition efficiency and mechanical properties of the deposited ta-C thin film. The influence and contribution of variables, such as arc current, substrate bias voltage, frequency, and duty cycle, on the properties of ta-C were investigated in terms of deposition efficiency and mechanical properties. It was revealed that the deposition rate was linearly increased following the increasing arc current (around 10 nm/min @ 60 A and 17 nm/min @ 100A). The hardness and ID/IG showed a correlation with substrate bias voltage (over 30 GPa @ 50 V and under 30 GPa @ 250 V). The scratch tests were conducted to specify the effect of each parameter on the resistance to plastic deformation of films. The analysis on variances showed that the arc current and substrate bias voltage were the most effective controlling parameters influencing properties of ta-C films. The optimized parameters were extracted for the target applications in various industrial fields.

참고문헌 (23)

  1. Y.H. Cheng, "Influence of substrate bias on the structure and mechanical properties of ta-C:W films deposited by filtered cathodic vacuum arc", Surf. Coat. Technol, 146-147, pp.398~404 (2001)
  2. Jung-Hwan In, "Control of residual stress of tetrahedral amorphous carbon thin film deposited on dielectric material by filtered cathodic vacuum arc source by using mid-frequency pulse bias voltage", Surf. Coat. Technol, 349, pp.909~916 (2018)
  3. D. Sheeja, "Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasing", Thin Solid Films, 420-421, pp.62~69 (2002)
  4. 김영식, "실험계획법에 의한 Cr2O3 플라즈마 코팅의 최적공정 설계", 동력시스템공학회지, 22(2), pp.75~80 (2018), 한국동력기계공학회[DOI]
  5. 박영식, "수지의 하전 입자빔 전처리 공정의 최적화", 응용통계연구, 27(4), pp.543~552 (2014), 한국통계학회
  6. John Robertson, "Plasma Deposition of Diamond-Like Carbon", Jpn. J. Appl. Phys, 50, pp.01AF01~ (2011)
  7. Y. Lifshitz, "Subplantation model for film growth from hyperthermal species", Phys. Rev. B, 41, pp.10468~10480 (1990)
  8. Jongkuk Kim, "Improvement of Source Stabilization and Beam Transport Efficiency in Filtered Vacuum Arc Source of Carbon", pp.2000
  9. Abdul Wasy Zia, "Evaluation of bias voltage effect on diamondlike carbon coating properties deposited on tungsten carbide cobalt", Surf. Interface Anal, 46, pp.152~156 (2014)
  10. Peng Wang, "The effect of applied negative bias voltage on the structure of Ti-doped a-C : H films deposited by FCVA", Appl. Surf. Sci, 253, pp.3722~3726 (2007)
  11. Md. Anisur Rahman, "sp3 content in ta-C films vs pulse bias width to the substrate : A correlative structural analysis", Diam. Relat. Mater, 18, pp.1343~1347 (2009)
  12. Namwoong Paik, "Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source", Surf. Coat. Technol, 200, pp.2170~2174 (2005)
  13. S. Zhang, "A phenomenological approach for the ID", IG ratio and sp3 fraction of magnetron sputtered a-C films, 2000, pp.123, 256~260
  14. Meng Qi, "Effect of various nitrogen flow ratios on the optical properties of(Hf : N)-DLC films prepared by reactive magnetron sputtering", AIP Adv, 7, pp.085012~ (2017)
  15. 김주희, "스크래치 시험을 통한 DLC 박막 파손과 밀착 특성 평가", 한국트라이볼로지학회지, 33(4), pp.127~133 (2017), 한국트라이볼로지학회[DOI]
  16. S. J. Bull, "Failure mode maps in the thin film scratch adhesion test", Tribol. Int, 30, pp.491~498 (1997)
  17. S. J. Bull, "An overview of the potential of quantitative coating adhesion measurement by scratch testing", Tribol. Int, 39, pp.99~114 (2006)
  18. Magdalena Łępicka, "The initial evaluation of performance of hard anti-wear coatings deposited on metallic substrates:thickness, mechanical properties and adhesion measurements - a brief review", Rev. Adv. Mater. Sci, 58, pp.50~65 (2019)
  19. O. Nakonechna, "Effect of Cr Dopants on the Structure and Failure Mechanism of TiAlN Multilayered Films", Metallofiz. Noveishie Tekhnol, 41, pp.621~631 (2019)
  20. T. Tsui, "Nanoindentation and nanoscratching of hard carbon coatings for magnetic disks", Mat. Res. Soc. Symp. Proc, 383, pp.447~452 (1995)
  21. Hind Zegtouf, "A study of properties of ZrO2thin films deposited by magnetron sputtering under different plasma parameters : Biomedical application", J. Electr. Eng, 70, pp.117~121 (2019)
  22. 이철승, "FVA 증착법에 의해 합성된 ta-C 박막의 구조 및 물성 제어", Applied Science and Convergence Technology, 11(1), pp.8~15 (2002), 한국진공학회
  23. 강용진, "공정 온도에 따른 사면체 비정질 카본 (ta-C) 코팅의트라이볼로지적 특성연구", 한국트라이볼로지학회지, 35(6), pp.362~368 (2019), 한국트라이볼로지학회

관련 논문AI추천

자장여과아크소스의 자장필터 꺾임 각도와 아크방전전류에따라 증착된 ta-C 코팅의 마모 거동 연구김송길, 김원석, 김종국, 장영준한국트라이볼로지학회 · 한국트라이볼로지학회지2022 · 제38권 제3호DLC (ta-C) 후막코팅을 위한 트라이볼로지 코팅 연구강용진, 김기택, 김종국, 장영준한국트라이볼로지학회 · 한국트라이볼로지학회지2016 · 제32권 제4호다구찌 강건 설계를 통한 반도체 Probe상 Ti 도핑된 DLC(ta-C:Ti) 코팅 막의 전도성 및 기계적 물성 연구김도영, 김종국, 신준기, 장영준한국트라이볼로지학회 · 한국트라이볼로지학회지2022 · 제38권 제6호공정 온도에 따른 사면체 비정질 카본 (ta-C) 코팅의트라이볼로지적 특성연구강용진, 김도현, 김종국, 류호준, 장영준한국트라이볼로지학회 · 한국트라이볼로지학회지2019 · 제35권 제6호다층막 ta-C 코팅 적용을 통한 절삭공구의 내마모성 향상강용진, 김도현, 김종국, 장영준한국표면공학회 · 한국표면공학회지2020 · 제53권 제6호의료용 폴리머 소재를 활용한 3D 프린팅 인공치아용사면체 비정질 카본 코팅 기술 연구김종국, 신창희, 유성미, 장영준한국트라이볼로지학회 · 한국트라이볼로지학회지2022 · 제38권 제6호

이 간행물의 다른 논문 (7건)

Study of High Temperature of Inconel 740 Alloy in Air and Ar-0.2%SO2 Gas김민정, 이동복pp. 43-52대기 노출된 Al2024 알루미늄 합금 산화막에 대한 미세조직 분석권대엽, 반치범, 최원준pp. 62-70Ag925의 전기화학적 특성에 미치는 네오디뮴 함량의 영향정원섭, 정승진, 신병현pp. 71-76산화그래핀(GO)의 플라스틱(PS) 표면 코팅방법에 대한 연구임정옥, 박단비, 박재범, 허증수, 이지훈pp. 77-83영상분할법을 이용한 강판상의 부식 감지김범수, 김연원, 양정현pp. 84-89
원문 보기