분무건조법에 의한 ITO 나노분말의 합성과 특성
Synthesis and Properties of ITO Nano Powders by Spray Drying Process
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Abstract
The Indium Tin Oxide(ITO) nano powders were prepared by spray drying and heat treatment process. The liquid solution dissolved Indium and Tin salts was first spray dried to prepare chemically homogeneous precursor powders at the optimum spray drying conditions. Subsequently, the precursor powders were subjected to heat treatment process. The nano size ITO powders was synthesized from the previous precursor powders and the impurities also were decreased with increasing heat treatment temperature. Furthermore, the lattice parameter of ITO nano powders was increased by doping Tin into Indium with increasing heat treatment temperature. The particle size of the resultant ITO powders was about 20~50nm and chemical composition was composed of In:Sn = 86:10 wt.% at 800℃.
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