전기화학적 에칭법을 이용한 AFM용 텅스텐 탐침 제작에 관한 연구
Fabrication of Tungsten Probe Tips for AFM using Electrochemical Etching
0
조회
0
다운로드
1
인용
0
참고문헌
키워드
초록
As commercial atomic force microscopy (AFM) probes made of Si and Si3N4 have low stiffness, it is difficult to induce sufficient elastic deformation on the surface of a specimen in a tapping mode. Therefore, high-guality phase contrast images can not obtained. On the other hand, a tungsten AFM probe has relatively higher stiffness than a commercial AFM probe. Accordingly, it is expected to provide an enhanced phase contrast image, which is an effective tool for achieving a better understanding of the micromechanical properties of worn surfaces and wear mechanisms. In this study, on electrochemical etching method was optimized to fabricate tungsten probe tips for an AFM. Electrochemical etching was performed by applying pulse waves with a 20% duty cycle at various voltages instead of only a DC voltage, which has been commonly used.
Abstract
As commercial atomic force microscopy (AFM) probes made of Si and Si3N4 have low stiffness, it is difficult to induce sufficient elastic deformation on the surface of a specimen in a tapping mode. Therefore, high-guality phase contrast images can not obtained. On the other hand, a tungsten AFM probe has relatively higher stiffness than a commercial AFM probe. Accordingly, it is expected to provide an enhanced phase contrast image, which is an effective tool for achieving a better understanding of the micromechanical properties of worn surfaces and wear mechanisms. In this study, on electrochemical etching method was optimized to fabricate tungsten probe tips for an AFM. Electrochemical etching was performed by applying pulse waves with a 20% duty cycle at various voltages instead of only a DC voltage, which has been commonly used.
참고문헌 (8)
- H. S. Ahn, "Application of Phase Contrast Imaging Atomic Force Microscopy to Tribofilms on DLC Coatings", Wear, 249, pp.617~625 (2002)
- G. Binnig, "Scanning Tunneling Microscopy", Helv. Phys. Acta, 55, pp.726~735 (1982)
- E. W. Muller, "Field Ion Microscopy" (1968), Elsever
- D. I. Kim, "Etching voltage control technique for electrochemical fabrication of scanning probe microscope tips", Rev. Sci. Instrum, 73, pp.1337~1339 (2002)
- C. S. Kim, "Fabrication and Evaluation of Electron Beam Tip for Field Emission", Proceedings of the KSME Spring conference, pp.224~228 (2007)
- Y. Ge, "A Reproducible Electropolishing Technique to Customize Tungsten SPM Probe: From Mathematical Modeling to Realization", Journal of Materials Processing Technology, 213, pp.11~19 (2013)
- B. F. Ju, "Systematic Study of Electropolishing Technique for Improving the Quality and Production Reproducibility of Tungsten STM Probe", Sensors and Actuators A, 155, pp.136~144 (2009)
- H. J. Oh, "Fabrication of Ultra-sharp Tungsten Tip using Electrochemical Etching System", proceedings of the KSMTE spring conference, pp.449~452 (2001)