포켓의 깊이가 공기 베어링 스테이지의 햄머링 현상에 미치는 영향
Effect of the Pocket Depth on the Hammering Behavior of an Air Bearing Stage
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초록
An air-bearing stage uses externally pressurized air as the lubricant between the stage and the rail. The supporting force generated by the supplied air makes the stage rise and move smoothly with extremely low friction. Mechanical contacts rarely happen, the bearing surfaces do not produce wear particles, and dust is not generated. It also has the advantage of having low energy loss and high precision. Because of its advantages, an airbearing stage is used in several types of machines that require high precision. In this article, the effect of the pocket depth on the hammering phenomena of the air bearing is studied. An analysis program is developed to calculate the dynamic behavior of the stage by solving the Reynolds equation between the stage and the guideway and the equations of motion on the stage. The acceleration, constant movement, and deceleration are applied to the stage. The stage is modeled as a five-degree-of-freedom system. In the course of the dynamic behavior, the hammering phenomena occur under some special conditions. The deeper the pocket, the more unstable the behavior of the stage, and air hammering occurs when it exceeds a certain depth. In addition, the higher the supply pressure, the more unstable the behavior of the stage. However, hammering occurs even with a shallow pocket depth. Other conditions that affect the hammering phenomena are calculated and discussed.
Abstract
An air-bearing stage uses externally pressurized air as the lubricant between the stage and the rail. The supporting force generated by the supplied air makes the stage rise and move smoothly with extremely low friction. Mechanical contacts rarely happen, the bearing surfaces do not produce wear particles, and dust is not generated. It also has the advantage of having low energy loss and high precision. Because of its advantages, an airbearing stage is used in several types of machines that require high precision. In this article, the effect of the pocket depth on the hammering phenomena of the air bearing is studied. An analysis program is developed to calculate the dynamic behavior of the stage by solving the Reynolds equation between the stage and the guideway and the equations of motion on the stage. The acceleration, constant movement, and deceleration are applied to the stage. The stage is modeled as a five-degree-of-freedom system. In the course of the dynamic behavior, the hammering phenomena occur under some special conditions. The deeper the pocket, the more unstable the behavior of the stage, and air hammering occurs when it exceeds a certain depth. In addition, the higher the supply pressure, the more unstable the behavior of the stage. However, hammering occurs even with a shallow pocket depth. Other conditions that affect the hammering phenomena are calculated and discussed.
참고문헌 (10)
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