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열가소성 폴리머필름의 트라이볼로지 특성에 대한 온도의 영향

Effects of Temperature on the Tribological Characteristics of Thermoplastic Polymer Film

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주제분류기계공학

초록

Friction tests were carried out in order to investigate the effects of emperature on the friction and wear behaviors between a PMMA film and a fused silica lens using a microtribometer. The friction forces on the PMMA film were measured under atmospheric condition as the temperature of the film was increased from 300 K to 443 K. The contact area between the film and the lens was observed. The tribological characteristics of the film were significantly changed as the temperature increased. The changes were discussed with the change of the film state from glassy to viscous flow. In addition, the results showed that the friction behavior can be varied with the thermal history of the PMMA film. Residual solvent in the PMMA film could emerge to the PMMA surface due to an additional heating and the solvent on the film surface decreased the friction force.

Abstract

Friction tests were carried out in order to investigate the effects of emperature on the friction and wear behaviors between a PMMA film and a fused silica lens using a microtribometer. The friction forces on the PMMA film were measured under atmospheric condition as the temperature of the film was increased from 300 K to 443 K. The contact area between the film and the lens was observed. The tribological characteristics of the film were significantly changed as the temperature increased. The changes were discussed with the change of the film state from glassy to viscous flow. In addition, the results showed that the friction behavior can be varied with the thermal history of the PMMA film. Residual solvent in the PMMA film could emerge to the PMMA surface due to an additional heating and the solvent on the film surface decreased the friction force.

참고문헌 (36)

  1. Chou, S.Y, "NanoimprintLithography", J. of Vacuum Science and TechnologyB, 14(6), pp.4129~4133 (1996)
  2. Austin, M.D, "Fabrication of5 nm Linewidth and 14 nm Pitch Features by NanoimprintLithography", Applied Physics Letters, 84(26), pp.5299~5301 (2004)
  3. Zhang, W, "Fabrication of 60-nmTransistors on 4-in. Wafer Using Nanoimprint at allLithography Levels", Applied Physics Letters, 83(8), pp.1632~1634 (2003)
  4. Chao, C, "Polymer Microring ResonatorsFabricated by Nanoimprint Technique", J. ofVacuum Science and Technology B, 20(6), pp.2862~2866 (2002)
  5. Arakcheeva, E.M, "Fabrication of SemiconductorandPolymer-based Photonic Crystals Using NanoimprintLithography", Technical Physics, 50(8), pp.1043~1047 (2005)
  6. Ahn S W, "Fabrication of a 50 nmHalf-pitch Wire Grid Polarizer Using NanoimprintLithography", Nanotechnology, 16(9), pp.1874~1877 (2005)
  7. Hirai, Y, "Defect Analysisin Thermal Nanoimprint Lithography", J. ofVacuum Science and Technology B, 21(6), pp.2765~2770 (2003)
  8. Hirai, Y, "High Aspect Pattern Fabrication by Nano ImprintLithography Using Fine Diamond Mold", JapaneseJ. of Applied Physics Part 1, 42, pp.3863~3866 (2003)
  9. Kang, J.H, "MolecularDynamics Study of Pattern Transfer in NanoimprintLithography", Tribology Letters, 25(2), pp.93~102 (2007)
  10. Jaszewski, R. W, "Properties of Thin Anti-adhesive Filmsused for the Replication of Microstructures in Polymers", Microelectronic Engineering, 45(1), pp.381~384 (1997)
  11. Bailey, T, "Step and Flash Imprint Lithography: TemplateSurface Treatment and Defect Analysis", J. ofVacuum Science and Technology B, 18(6), pp.3572~3577 (2000)
  12. Beck, M, "ImprovingStamps for 10 nm Level Wafer Scale NanoimprintLithography", Microelectronic Engineering, 61, pp.441~448 (2002)
  13. Jung, G.Y, "Vaporphase Self-assembled Monolayer for Improved Mold Release in Nanoimprint Lithography", Langmuir, 21, pp.1158~1161 (2005)
  14. Schift, H, "Controlled Co-evaporation of Silanes for Nanoimprint Stamps", Nanotechnology, 16, pp.S171~S175 (2005)
  15. Chen, J. K, "Effect of Fluoroalkyl Substituents on the Reactions of Alkylchlorosilanes with Mold Surfaces for Nanoimprint Lithography", J. of Vacuum Science and Technology B, 22(6), pp.3233~3241 (2004)
  16. Park, S. G, "Anti-adhesive Layers on Nickel Stamps for Nanoimprint Lithography", Microelectronic Engineering, 73, pp.196~201 (2004)
  17. Kim, K.S, "Effects of the Anti-sticking Layer Derived from (1H,1H,2H,2H-perfluorooctyl) Trichlorosilane on Adhesion Between the Mold and Thermoplastic Polymer Film in Thermal Nanoimprint Lithography", Tribology International (2009)
  18. Choi, D.G, "Fluorinated Organic-inorganic Hybrid Mold as a New Stamp for Nanoimprint and Soft Lithography", Langmuir, 21(21), pp.9390~9392 (2005)
  19. Tambe, N.S, "Scale Dependence ofMicro", nano-friction and Adhesion of MEMS, Nanotechnology, pp.2004, 15[DOI]
  20. Tambe, N. S, "Micro", nanotribological Characterization of PDMS and PMMA used forBioMEMS, Ultramicroscopy, pp.2005, 105[DOI]
  21. Bhushan, B, "Adhesion and Friction Properties of Polymers in Microfluidic Devices", Nanotechnology, 16, pp.467~478 (2005)
  22. Hammerschmidt, J.A, "Probing Polymer Viscoelastic Relaxations with Temperature-controlled Friction Force Microscopy", Macromolecules, 32(10), pp.3360~3367 (1999)
  23. Zeng, H, "Adhesion and Friction of Polystyrene Surfaces Around Tg", Macromolecules, 39, pp.2350~2363 (2006)
  24. Pocius, A.V, "Adhesion and Adhesives Technology: An Introduction", pp.1997, Hanser
  25. Briscoe, B.J, "Structure-property Relationships in Thin Solid Poly(methyl methacrylate) Boundary Films", Tribology Transactions, 38, pp.382~388 (1995)
  26. Briscoe, B.J, "The Influence of Solvent Quality on the Mechanical Properties of Thin Cast Isotactic Poly(methyl methacrylate) Coatings", J. of Materials Science, 37, pp.4929~4936 (2002)
  27. Kim, K.S, "The Effect of Temperature on the Nano-scale Adhesion and Friction Behaviors of Thermoplastic Polymer Films", Nanotechnology, 19, pp.105701~ (2008)
  28. 김광섭, "열가소성 폴리머 필름의 마이크로 점착 거동에 대한 온도의 영향", 한국윤활학회지, 25(2), pp.86~95 (2009), 한국윤활학회
  29. Callister, W.D, "Material science and engineering: anintroduction, 5th edition", pp.791~796 (2000), John Wiley & Sons, Inc
  30. Wei, G, "Microfabrication and Nanomechanical Characterization of Polymer Microelectromechanical System for Biological Applications", J. of Vacuum Science and Technology B, 23(4), pp.811~819 (2005)
  31. Saffman, P.G, "The Penetration of a Fluid Into a Porous Medium or Hele-Shaw Cell Containing a More Viscous Liquid", Proceedings of the Royal Society of London, Series A, Mathematical and Physical Sciences, 245(1242), pp.312~329 (1958)
  32. Zeng, H, "Transient Interfacial Patterns and Instabilities Associated with Liquid Film Adhesion and Spreading", Langmuir, 23, pp.6126~6135 (2007)
  33. Mary, P, "Deformation of Elastic Coatings in Adhesive Contacts with Spherical Probes", J. of Physics D: Applied Physics, 39, pp.3665~3673 (2006)
  34. Zeng, H, "Transient Surface Patterns and Instabilities at Adhesive Junctions of Viscoelastic Films", Langmuir, 23, pp.6126~6135 (2007)
  35. Bistac, S, "Study of Solution-cast Films of PMMA by Dielectric Spectroscopy: Influence of the Nature of the Solvent on a and b Relaxations", International J. of Adhesion and Adhesives, 17(3), pp.197~201 (1997)

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