마모가 SAW 모터 구동특성에 미치는 영향
The Effect of Wear on the SAW Motor Driving Characteristics
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Recently the demand for a fast and precise actuator in semiconductor industries is growing larger. A SAW motor is now expected as a new friction-drive actuator to meet such demand. However, its friction and wear properties are almost unknown and its low stability and reliability still remain to be solved. In this research the tests of SAW motor were carried out and its durability was discussed. The effect of wear caused by friction on the driving force and driving speed were clarified.
Abstract
Recently the demand for a fast and precise actuator in semiconductor industries is growing larger. A SAW motor is now expected as a new friction-drive actuator to meet such demand. However, its friction and wear properties are almost unknown and its low stability and reliability still remain to be solved. In this research the tests of SAW motor were carried out and its durability was discussed. The effect of wear caused by friction on the driving force and driving speed were clarified.
참고문헌 (8)
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- Takashi Shigematsu, "Friction Drive of an SAW Motor. Part I: Measurements", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 55(8), pp.2016~2024 (2008)
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- Takashi Shigematsu, "Friction Drive of an SAW Motor. Part III: Modeling", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 55(10), pp.2266~2276 (2008)
- Takashi Shigematsu, "Friction Drive of an SAW Motor. Part IV:Physics of Contact", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 55(10), pp.2277~2287 (2008)
- Takashi Shigematsu, "Friction Drive of an SAW Motor. Part V: Design Criteria", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 55(10), pp.2288~2297 (2008)