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LCD공정에서 스토커시스템 성과측정 모델

A Performance Model for Stocker Systems in Liquid Crystal Display (LCD) Fabrication Lines

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초록

The stocker system is another name of automated storage and retrieval system (AS/RS) and being popularly used as main material handling tools in Liquid Crystal Display (LCD) and semiconductor fabrication facilities. Recently the use of the stocker system has been extended to transportation from conventional storage and retrieval in LCD fabrication facilities. Toolsets are connected in the ground level of the stocker system and 4~6 stories of the shelves are placed in the upper or lower ground level. As a consequence of the more sophisticated design, move requests imposed on the system greatly increased. For solving this problem, the industry adopted the dual-robot stocker system that two robots are moving along the same guide line in the stocker system. This research develops a closed-form solution to estimate a delivery rate of the dual robot stocker system under given design and operation parameters. Using this stochastic model, industry practitioners could analyze performance levels under given various design parameters, and ultimately the model helps optimizing the design parameters.

Abstract

The stocker system is another name of automated storage and retrieval system (AS/RS) and being popularly used as main material handling tools in Liquid Crystal Display (LCD) and semiconductor fabrication facilities. Recently the use of the stocker system has been extended to transportation from conventional storage and retrieval in LCD fabrication facilities. Toolsets are connected in the ground level of the stocker system and 4~6 stories of the shelves are placed in the upper or lower ground level. As a consequence of the more sophisticated design, move requests imposed on the system greatly increased. For solving this problem, the industry adopted the dual-robot stocker system that two robots are moving along the same guide line in the stocker system. This research develops a closed-form solution to estimate a delivery rate of the dual robot stocker system under given design and operation parameters. Using this stochastic model, industry practitioners could analyze performance levels under given various design parameters, and ultimately the model helps optimizing the design parameters.

참고문헌 (10)

  1. Agrawal,G.K, "A survey of automated material handling systems in 300-mm semiconductor fabs", IEEE Transactions on Semiconductor Manufacturing, 19(1), pp.112~120 (2006)
  2. Bozer,Y.A, "Travel-time models for automated storage", retrieval systems, 1984, pp.16(1), 38~46
  3. Banks,J, "Introduction to simulation", Proceedings of the 1999 Winter Simulation Conference, pp.7~13 (1999)
  4. Jang,Y.J, "Introduction to automated material handling systems in LCD panel production lines", IEEE International Conference on CASE ʻ 06, pp.223~229 (2006)
  5. Jang,Y.J, "Modeling and analysis of stocker system in semiconductor and LCD fab", Proceedings on IEEE International Symposium on Semiconductor Manufacturing, pp.273~276 (2005)
  6. Jang,J, "An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines", International Journal of Production Research, 39(17), pp.3901~3921 (2001)
  7. Johnson,R.V, "Finding building shapes that minimize mean trip times", Computer Aided Design, 24(2), pp.105~113 (1992)
  8. Kouvelis,P, "Expected travel time and optimal boundary formulas for a two-classbased automated storage", retrieval system, 1995, pp.33(10), 2889~2905
  9. Lee,Y.H, "Optimal design of rack structure with modular cell in AS", RS, 2005, pp.98(2), 172~178
  10. Montoya-Torres,J.R, "A literature survey on the design approaches and operationalissues of automated wafer-transport systems for wafer fabs", Production Planning and Control, 17(7), pp.648~663 (2006)

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