Analysis of nano-cluster formation in the PECVD process
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
In this paper, the ultra water-repellent thin films were prepared by RF PECVD. On the basis of surface morphology, chemical bonding states and plasma diagnostics, a formation model of clusters for the ultra water-repellent films was discussed from considerations of formation process and laser scattering results. Moreover, using laser scattering method, the relative change of quantity of nano-clusters or size of agglomerates could be confirmed. From the results, the films were deposited with nano-clusters and those of agglomerates,which formed in organosilicon plasma, and formation of agglomerates were depended on the deposition time.
Abstract
In this paper, the ultra water-repellent thin films were prepared by RF PECVD. On the basis of surface morphology, chemical bonding states and plasma diagnostics, a formation model of clusters for the ultra water-repellent films was discussed from considerations of formation process and laser scattering results. Moreover, using laser scattering method, the relative change of quantity of nano-clusters or size of agglomerates could be confirmed. From the results, the films were deposited with nano-clusters and those of agglomerates,which formed in organosilicon plasma, and formation of agglomerates were depended on the deposition time.
참고문헌 (11)
- H. M. Shang, "Optically transparent superhydrophobic silica-based films", Thin Solid Films, 472, pp.37~ (2005)
- X. Lu, "Low-density polyethylene superhydrophobic surface by control of its crystallization behavior", Macromolecular Rapid Communications, 25, pp.1606~ (2004)
- W. Li, "A thermodynamic approach for determining the contact angle hysteresis for superhydrophobic surfaces", Journal of Colloid and Interface Science, 292, pp.195~201 (2005)
- H. Y. Erbil, "Transformation of a simple plastic into a superhydrophobic surface", Science, 299, pp.1377~1380 (2003)
- A. Nakazima, "Preparation of transparent superhydrophobic boehmite and silica films by sublimation of aluminum acetyl acetonate", Advanced Materials, 11, pp.1365~1368 (1999)
- Y. Wu, "Nanotextures fabricated by microwave plasma CVD : application to ultra water-repellent surface", Surface and Coating Technology, 174, pp.867~871 (2003)
- Yong-Sup Yun, "Formation of SiO:CH Ultra Water Repellent Thin Films by Inductively Coupled RF PECVD", 한국마린엔지니어링학회지, 35(3), pp.323~328 (2011), 한국마린엔지니어링학회
- Z. Yoshimitsu, "Effects of surface structure on the hydrophobicity and sliding behavior of water droplets", Langmuire, 18, pp.5818~5822 (2002)
- A. Lafuma, "Superhydrophobic states", Nature Materials, 2, pp.457~ (2003)
- Y. Yun, "Behavior of various organosilicon molecules in PECVD processes for hydrocarbon-doped silicon oxide films", Solid State Phenomena, 124, pp.347~350 (2007)
- Y. S. Yun, "Fabrication of ultra water-repellent thin films by PECVD method and observation of deposition process", Journal of The Surface Finishing Society of Japan, 58, pp.307~311 (2007)