유전체 다중층을 이용한 국소 표면 플라즈몬 공명 센서의 감도 향상에 관한 연구
Estimation of Sensitivity Enhancements on Localized Surface Plasmon Resonance Sensor Using Dielectric Multilayer
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초록
본 논문에서는 LSPR 센서에 적용하기 위한 제한된 높이 100 nm에서 TiO2 , SiO2의 다중층을 이용한 LSPR 센서를 디자인을제안했다. LSPR 센서의 구조는 유전체 층과 나노 구조가 있는 금속층으로 디자인 하였다. 금속층은 금 박막 40 nm와 높이 40nm, 주기 600 nm, 선폭 300 nm인 나노와이어 구조체를 올려놓은 구조로 디자인하였다. 유전체 층의 높이를 100nm로 제한하고,TiO2, SiO2가 반복되는 구조로 하여 반복층의 개수를 1~4개로 변경하면서 비교 분석하였다. 파장 가변형 SPR을 디자인하기 위해각도를 75도로 고정하고 파장을 변화시켜 FEM방식으로 계산하였다. 결과로 굴절율이 고정되어 있을 때 다중층의 개수가 증가할수록 공명 파장이 짧아지는 현상을 확인 하였고, 파장의 변화에 더 민감하게 변화하는 것을 측정하였다. 다만, 다중층의 개수가3개층 이상이 되면 변화하지 않는 것을 확인하였다.
Abstract
In this research, we designed an LSPR sensor based on a thin-film multilayer comprising TiO2 and SiO2. The thickness of theoverall substrate layer of the suggested multilayer LSPR sensor is limited to 100 nm, and the number of repeating TiO2 and SiO2thin films is 1-4 within a limited thickness. Additionally, a nanowire structure with a gold thin film of 40 nm, height of 40 nm,period of 600 nm, and line width of 300 nm was formed on the multilayer. To design the variable wavelength-type SPR, theangle was fixed at 75° and the wavelength was changed. We then simulated the system with the finite-element method (FEM)using Maxwell’s equations. It was confirmed that the resonance wavelength became shorter as the number of multilayers increasedwhen the refractive index was fixed. We found that the wavelength changes were more sensitive. However, no changes wereobserved when the number of the multilayers was three or higher.
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