수소화 표면 개질이 나노다이아몬드 seed 입자의 분산 및 핵형성 밀도에 미치는 영향
Effect of hydrogenation surface modification on dispersion and nucleation density of nanodiamond seed particle
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수소 분위기 열처리 및 수소 플라즈마 처리의 두 가지 수소화 표면개질을통해 나노다이아몬드 seed 입자의 분산 향상 및 평탄한 초미세 나노결정질 다이아몬드 박막증착을 위한 핵형성 밀도 향상을 확보하였다. 수소화 처리 이후 나노다이아몬드 입자 표면의 탄소-산소 및 산소-수소 결합기가 탄소-수소 결합기로 전환되는 화학적 표면개질이 진행되었고Zeta 전위가 증가하였다. 분산도 향상에 따라 나노다이아몬드 응집체 크기가 현저하게 감소하였고 핵형성 밀도는 크게 증가하였다. 600°C, 수소분위기에서 열처리 이후 나노다이아몬드 평균 입자 크기가 3.5 μm에서 34.5 nm로 크게 감소하였고,seeding 된 Si 기판 표면에서 ~3.9 × 1011nuclei/cm2의 매우 높은 핵형성 밀도를 확보하였다.
Abstract
Two hydrogenation surface modifications, namely hydrogen atmosphere heat treatment and hydrogen plasmatreatment, were found to lead to improved dispersion of nanodiamond (ND) seed particles and enhanced nucleation density fordeposition of smooth ultrananocrystalline diamond (UNCD) film. After hydrogenation, the C-O and O-H surface functionalitieson the surface of nanodiamond particles were converted to the C-H surface functionalities, and the Zeta potential wasincreased. As the degree of dispersion was improved, the size of nanodiamond aggregates decreased significantly andnucleation density increased dramatically. After hydrogen heat treatment at 600°C, average size of ND particles was greatlyreduced from 3.5 μm to 34.5 nm and a very high nucleation of ~3.9 × 1011nuclei/cm2was obtained for the seeded Si surface.
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