Crystal growth of BT-based ferroelectric films for nonvolatile memories
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Abstract
Issues of ferroelectric high-density memories (> 64 Mb) indispensable for upcoming ubiquitous era have been on the cell integration less than 0.1 um2 and reliabilities. Thus nanoscale control of microstructures of ferroelectric films with large switching polarization has been one of the issues to obtain the uniform electrical properties for realization of high-density memories. In this study the grain orientations and distributions of BT-based films by spin-on coatings were examined by FEG-SEM/EBSD. Ferroelectric domain characteristics by PFM were also performed to study the dependence of reliabilities on the grain orientations and distributions. It is believed that understandings of the nucleation and growth mechanisms of the a- or b-axis oriented films during the thermal processes such as RTA and furnace annealing affecting on grain orientation and uniformity could be possible based on our experimental results.
참고문헌 (11)
- B. Yang, "Highly reliable ferroelectric memories using BLT thin films and robust integration schemes", 23, pp.743~ (2002)
- B. Yang, "Feroelectric memories using randomly oriented BLT films", 42, pp.1~ (2003)
- B. Yang, "Highly reliable 1Mbit ferroelectric memories with newly developed BLT thin films and steady integration chemes", 791 (2001)
- A. Gruverman, "Auciello andT. Venkatesan, ?Nanoscale imaging of domain dynam-ics and retention in ferroelectric thin films Appl.", 71, pp.3492~ (1997)
- B.H. Park, "Lanthanum-substitutedbismuth titanate for use in non-volatile memories", 401, pp.682~401 (1999)
- A. Roelofs, "Depo-larizing-field-mediated 180oswitching in ferroelectricthin films with 90o domains,", 80, pp.1424~ (2002)
- C.S. Ganpule, "Imaging thre-dimensional polar-ization in epitaxial polydomain ferroelectric thin films,", 91, pp.1477~ (2002)
- S.I. Wright, "Materials Science and Engi-neering", pp.165~ (1998)
- J. Witborn, "Nanoscale imaging of domainsand domain wals in periodicaly poled ferroelectricsusing atomic force microscopy", 80, pp.1622~ (2002)
- C.S. Ganpule, "Phys. Polarization relaxation kinetics and 180odomainwal dynamics in ferroelectric thin films, , Rev." (2001)
- A. Gruverman, "A. Kingon and H. Toku-moto, Asymetric nanoscale switching in feroelectricthin films by scanning force microscopy,", 78(2001), pp.2751~78 (2001)