The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system
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Carbon nanofilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases under thermal chemical vapor deposition system. By the incorporation of SF6 as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nanosized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without SF6 incorporation were investigated. Diameter size reduction for the individual CNFs-related shape and the enhancement of the formation density of CNFs-related material could be achieved by the incorporation of SF6 as a cyclic modulation manner. The cause for these results was discussed in association with the slightly increased etching ability by SF6 addition and the sulfur role in SF6 for the geometry change.
Abstract
Carbon nanofilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases under thermal chemical vapor deposition system. By the incorporation of SF6 as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nanosized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without SF6 incorporation were investigated. Diameter size reduction for the individual CNFs-related shape and the enhancement of the formation density of CNFs-related material could be achieved by the incorporation of SF6 as a cyclic modulation manner. The cause for these results was discussed in association with the slightly increased etching ability by SF6 addition and the sulfur role in SF6 for the geometry change.
참고문헌 (16)
- S.J. Tans, "Individual single-wall carbon nanotube as quantum wires", Nature, 386, pp.474~ (1997)
- L. Marty, "Batch processing of nanometer-scale electrical circuitry based on in-situ grown single-walled carbon nanotubes", Microelectronic Engineering, 61(62), pp.485~ (2002)
- L.J. Pan, "Field emission properties of carbon tubule nanocoils", Jpn. J. Appl. Phys, 40, pp.235~ (2001)
- S. Amelinckx, "A formation mechanism for catalytically grown helix-shaped graphite nanotubes", Science, 265, pp.635~ (1994)
- A. Fonseca, "Growth mechanism of coiled carbon nanotubes", Carbon, 33, pp.1759~ (1995)
- K. Akagi, "Electronic structure of helically coiled cage of graphitic carbon", Phys. Rev. Lett, 74, pp.2307~ (1995)
- D.S. Bethune, "Cobalt-catalyzed growth of carbon nanotubes with single-atomic-layer walls", Nature, 363, pp.605~
- M. Terrones, "Controlled production of aligned-nanotube bundles", Nature, 388, pp.52~ (1997)
- A. Thess, "Crystalline ropes of metallic carbon nanotubes", Science, 273, pp.483~ (1996)
- W.Z. Li, "Large-scale synthesis of aligned carbon nanotubes", Science, 274, pp.1701~ (1996)
- Z.F. Ren, "Synthesis of large arrays of well-aligned carbon nanotubes on glass", Science, 282, pp.1105~ (1998)
- K.-D. Kim, "Effect of the on", off cyclic modulation time ratio of C2H2, J. Nanosci. Nanotechnol, pp.2007, 7[DOI]
- A. Moisala, "The role of metal nanoparticles in the catalytic production of single-walled carbon nanotubes-a review", J Phys: Condens Matter, 15, pp.3011~ (2003)
- A.C. Dupuis, "The catalyst in the CCVD of carbon nanotubes-a review", Prog. Mater. Sci, 50, pp.929~ (2005)
- X. Chen, "Morphology of the growth tip of carbon microcoils", nanocoils, 1999, pp.37, 1817~
- S. Motojima, "Electrical properties of carbon micro coils", Carbon, 34, pp.289~ (1996)