Geometry variation for as-grown carbon coils under the minimized sulfur additive condition
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초록
Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases under thermal chemical vapor deposition system. By the incorporation of SF6 additive in cyclic modulation manner,the dominant formation of the nanosized carbon coils could be achieved with maintaining the minimized sulfur additive amount. The geometry variation of the as-grown carbon coils, such as linear type, microsized coil type, wavelike nanosized coil type,and nanosized coil type, were investigated according to the different cyclic modulation manner of SF6 flow. SF6 gas incorporation develops the coil-type geometry. Furthermore, the higher flow rate of SF6 gas increased the amount of the nanosized carbon coils. The slightly increased etching ability by SF6 addition seems to be the cause for these results.
Abstract
Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases under thermal chemical vapor deposition system. By the incorporation of SF6 additive in cyclic modulation manner,the dominant formation of the nanosized carbon coils could be achieved with maintaining the minimized sulfur additive amount. The geometry variation of the as-grown carbon coils, such as linear type, microsized coil type, wavelike nanosized coil type,and nanosized coil type, were investigated according to the different cyclic modulation manner of SF6 flow. SF6 gas incorporation develops the coil-type geometry. Furthermore, the higher flow rate of SF6 gas increased the amount of the nanosized carbon coils. The slightly increased etching ability by SF6 addition seems to be the cause for these results.
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