MOCVD를 이용한 금속 촉매 종류에 따른 β-Ga2O3 나노 와이어의 제작과 특성
Catalytic synthesis and properties of β-Ga2O3 nanowires by metal organic chemical vapor deposition
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Metal organic chemical vapor deposition(MOCVD) 방법을 이용하여 금속 촉매에 따른 β-Ga2O3 나노 와이어의 제작과 특성에 대해 연구하였다. 본 연구의 성장 조건에서 β-Ga2O3 나노 와이어의 성장이 가능한 금속 촉매는 Au, Cu 그리고Ni이 있었으며 각 금속 촉매로 성장한 나노 와이어는 성장률과 형상에 많은 차이가 있었다. Ni 촉매 성장의 경우에는Vapor-Solid(VS) 과정이 β-Ga2O3 나노 와이어 성장의 주된 메커니즘이고 Au, Cu 촉매 성장의 경우에는 Vapor-Liquid-Solid (VLS) 과정이 주된 성장 메커니즘 임을 확인할 수 있었다. 또한, 촉매의 종류에 따라서 β-Ga2O3 나노 와이어의 광학적 특성도 다르게 나타나는 것을 확인할 수 있었다. 반면, 동일한 성장 조건에서 Ti, Ag 그리고 Sn 금속은 나노 와이어 성장을위한 촉매로 작용하지 못하였다. 본 연구에서는 금속 촉매에 따른 나노 와이어의 성장 가능 여부와 성장한 나노 와이어의특성 변화가 금속 촉매의 녹는 점, 금속- Ga의 공융 점과 관련이 있음을 상태도와 연관 지어 밝혀내었다.
Abstract
Catalytic synthesis and properties of β-Ga2O3 nanowires grown by metal organic chemical vapor deposition are reported. Au, Ni and Cu catalysts were suitable for the growth of Ga2O3 nanowires under our experimental conditions. The Ga2O3 nanowires grown by using Au, Ni and Cu catalysts showed different growth rates and morphologies in each case. We found the Ga2O3 nanowires were grown by the Vapor-Solid (VS) process when Ni was used as a catalyst while the Vapor-Liquid-Solid (VLS) was a dominant process in case of Au and Cu catalysts. Also, we found nanowires showed different optical properties depend on catalytic metals. On the other hand, for the cases of Ti, Sn and Ag catalysts, nanowires could not be obtained under the same condition of Au, Cu and Ni catalytic synthesis. We found that these results are related to the different characteristics of each catalyst, such as, melting points and phase diagrams with gallium metal.
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