PVT 방법에 의한 링 모양의 SiC 다결정 성장
Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method
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초록
본 연구에서는 PVT(Physical Vapor Transport) 방법을 이용하여 반도체 식각 공정용 소재로 사용되는 링 모양의SiC(Silicon carbide) 다결정을 제조하였다. 흑연 도가니 내부에 원기둥 모양의 흑연 구조물을 배치하여 PVT법에 의한 링 모양의 SiC 다결정을 성장시켰다. 성장된 결정은 Raman 및 UVF(Ultra Violet Fluorescence) 분석을 이용하여 결정의 상분석을하였고, SEM(Scanning Electron Microscope), EDS(Energy Dispersive Spectroscopy) 분석을 통해 미세조직 및 성분을 확인하였다. PVT 성장 초기의 온도변화를 통하여 SiC 다결정의 결정립 크기와 성장 속도를 조절할 수 있었다.
Abstract
Ring-shaped SiC (Silicon carbide) polycrystals used as an inner material in semiconductor etching equipment was manufactured using the PVT (Physical Vapor Transport) method. A graphite cylinder structure was placed inside thegraphite crucible to grow a ring-shaped SiC polycrystal by the PVT method. The crystal polytype of grown crystal were analyzed using a Raman and an UVF (Ultra Violet Fluorescence) analysis. And the microstructure and components of SiC crystal were identified by a SEM (Scanning Electron Microscope) and EDS (Energy Disruptive Spectroscopy) analyses. The grain size and growth rate of SiC polycrystals fabricated by this method was varied with temperature variation in the initial stage of growth process.
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