열분해 온도와 성형압력의 영향에 따른 비정질 탄화규소 블록의 치밀화
Effect of pyrolysis temperature and pressing load on the densification of amorphous silicon carbide block
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초록
본 연구에서는 유기 규소 폴리머(organosilicon polymer)인 폴리카보실란(polycarbosilane, PCS)을 사용하여 비정질 탄화규소 블록을 제조를 진행하였다. 다양한 형상의 치밀한 탄화규소 블록은 큐어링된 PCS 미세분말을 일축가압성형기를 통해 2~8 ton 하중을 가한 후 1100℃, 1200℃, 1300℃, 1400℃의 열처리 과정을 거쳐 제조되었으며, 물리적 화학적 특성 분석을 위해 열중량분석기(TGA), 주사전자현미경(SEM), 에너지분광분석법(EDS), 만능시험기(UTM)을 이용하였다, 제조된 탄화규소 성형체는 열분해 온도가 증가함에 따라 SiO와 CO 가스로의 분해가 발생하였고, 비정질의 구조에서 β-SiC 결정입자가 성장함을 보였다. 또한, 밀도와 굴곡강도는 1100℃의 열분해 온도에서 제조된 탄화규소 성형체가 1.9038 g/cm3과 6.189MPa으로 가장 높았다. 제조된 비정질 탄화규소 블록은 이전에 보고된 마이크로파 도움 발열체와 같이 다른 분야에 적용 가능할 것으로 기대된다.
Abstract
In this study, an amorphous SiC block was manufactured using polycarbosilane (PCS), an organosilicon polymer. The dense SiC blocks were easily fabricated in various shapes via pyrolysis at 1100℃, 1200℃, 1300℃, 1400℃ after manufacturing a PCS molded body using cured PCS powder. Physical and chemical properties were analyzed using a thermogravimetric analyzer (TGA), scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), and universal testing machine (UTM). The prepared SiC block was decomposed into SiO and CO gas as the temperature increased, and β-SiC crystal grains were grown in an amorphous structure. In addition, the density and flexural strength were the highest at 1.9038 g/cm3 and 6.189 MPa of SiC prepared at 1100℃. The manufactured amorphous silicon carbide block is expected to be applicable to other fields, such as the previously reported microwave assisted heating element.
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