동시 증착 스퍼터링 공정에 의해 증착된 Pd-barium zirconate membrane의 구조분석
Structural properties of Pd-barium zirconate dense membrane synthesized by dual sputtering method
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초록
Barium zirconate는 화학적 안정성이 우수하고 고온에서의 프로톤 전도성이 뛰어나지만, 프로톤 전도도에 비해전자전도도가 현저히 떨어진다. 따라서 본 연구에서는 높은 수소 분리 특성을 위해 다공성 지지체 상에 Pd-Barium zirconate를 얇고 치밀한 박막으로 제조하고자 하였고, dual sputtering법을 이용하여 성공적으로 증착하였다. X-선 회절 분석을 통해 증착된 BaZr0.85Y0.15O3 − δ 박막은 300 이상에서부터 BaZrO3(Pm-3m) 결정상으로 결정화됨을 확인할 수 있었으며 표면과 단면에 대한 구조적 형상은 SEM과 TEM을 통해 관찰하였다. 관찰 결과 증착된 분리막은 치밀하였고 부채꼴의 주상으로 결정이 성장함을 확인할 수 있었다.
Abstract
Barium zirconate exhibits good thermo-chemical stability and proton conduction at high temperatures, but shows poor electron conductivity. Therefore, for high efficiency of hydrogen separation, a very thin and dense Pd-Barium zirconate membrane has to be coated on a porous substrate. A thin and dense Pd-Barium zirconate membrane was successfully synthesized on a porous substrate by means of dual sputtering method. The structural and chemical features of the BaZr0.85Y0.15O3 − δ membranes sputtered at 300oC and 400oC were investigated by X-ray diffractometry, and it was found that a well-crystallized membrane, Pm-3m space group of BaZrO3, was synthesized. The surface and cross-sectional morphologies of membrane were assessed by SEM (scanning electron microscopy) and TEM(transmission electron microscopy) of the surface and of cross sections. The cross sectional observation of Pd-BaZr0.85Y0.15O3 − δ membrane by dual sputtering shows that the coating is quite dense with columnar structure.
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