스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구
A study on the Pd-Ni alloy hydrogen membrane using the sputter deposition.
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Abstract
A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCl activation. Pd coating layer was prepared by dc magnetron sputtering deposition after H2 plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773K and pressure of 2.2psi. The hydrogen permeance was 6ml/mincm2atm and the selectivity was 120 for hydrogen/nitrogen(H2/N2) mixing gases at 773K. Kewords : Porous nikel metal support, Pd-Ni alloy hydrogen membrane, Plasma surface treatment, Electroplating, Sputtering deposition