불순물 첨가에 따른 VO2 후막 급변온도센서의 온도-저항 특성
Temperature vs. Resistance Characteristics by Dopants of VO2 Thick-Film Critical Temperature Sensors
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For various additives doped-VO2 critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of VO2 sensor, vanadium pentoxide (V2O5) powders were used, and CaO, SrO, Bi2O3, TiO2, and PbO dopants were used, respectively. The V2O5 powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on Al2O3 substrates and then V2O5-based thick films were heat-treated at 500oC for 2 hours in N2 gas atmosphere for the reduction to VO2. From X-ray diffraction analysis, VO2 phases for pure VO2, and CaO and SrO-doped VO2 thick films were confirmed and their grain sizes were 0.57 to 0.59 μm. The on/ off resistance ratio of the VO2 sensor in phase transition temperature range was 5.3×103 and that of the 0.5 wt.% CaO-doped VO2 sensor was 5.46×103. The presented critical temperature sensors could be commercialized for fire-protection and control systems.
Abstract
For various additives doped-VO2 critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of VO2 sensor, vanadium pentoxide (V2O5) powders were used, and CaO, SrO, Bi2O3, TiO2, and PbO dopants were used, respectively. The V2O5 powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on Al2O3 substrates and then V2O5-based thick films were heat-treated at 500oC for 2 hours in N2 gas atmosphere for the reduction to VO2. From X-ray diffraction analysis, VO2 phases for pure VO2, and CaO and SrO-doped VO2 thick films were confirmed and their grain sizes were 0.57 to 0.59 μm. The on/ off resistance ratio of the VO2 sensor in phase transition temperature range was 5.3×103 and that of the 0.5 wt.% CaO-doped VO2 sensor was 5.46×103. The presented critical temperature sensors could be commercialized for fire-protection and control systems.
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