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TEM 관련 이론해설 (6): 투과전자현미경의 고분해능영상이론: 결맞음 (1)

Theory of High Resolution TEM Image Formation: Coherence (1)

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참고문헌

주제분류자연과학일반

초록

고분해능 TEM 영상 이론의 결맞음 조사에서의 결맞음에 관한 개념을 소개하였다. 현미경에서 부분 결맞음 파동으로 인한 transfer function과 envelope의 발생을 설명하고 현미경의 분해능과 관련된 passband와 Scherzer 초점 조건을 소개하였다.

Abstract

In this review, the important ideas of coherence theory are introduced. The transfer function and dampingcondition of Scherzer focus are also disscussed in associated with the resolution of transmission electron microscope.

참고문헌 (9)

  1. "The spatial coherence of electron beams" (1975), Academic Press
  2. "Approximations for the calculation of high resolution eletron microscope images of thin films", pp.109~ (1977)
  3. "The envelope of electron microscope transfer functions for partially coherent illumination", 38, pp.519~ (1973)
  4. "Coherence of field emission electron beam" (1974)
  5. "Application of coherence theory in microscopy and interferometry", 47, pp.508~ (1957)
  6. "Resolution and illumination coherence in electron microscopy", 58, pp.125~ (1981)
  7. "High resolution electron microscopy by an incoherent illumination method", 14, pp.1815~ (1975)
  8. "Degradation of image resolution by a combination of incident beam divergence and spatial aberration" (1975)
  9. "Electron microscope transfer functions for partially coherent axial illumination", 49, pp.81~ (1977)

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