Effects of additives and granule powder on liquid phase sintering behavior and properties of black alumina
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Electrostatic charge control and reflectance reduction are essential in semiconductor and display lithography processes. White alumina, an electrical insulator, often causes charge accumulation and light scattering, which can destabilize theseprocesses. To overcome these drawbacks, black alumina ceramics with high density and low reflectivity are required. In thisstudy, domestic alumina powder was mixed with additives mainly composed of Co₂O₃ and TiO₂, and the effects of additivecontent and sintering temperature on densification, hardness, reflectivity, and color were investigated. In particular, the roleof spray granulation was examined by comparing compacts prepared with and without granulation, revealing its importancein achieving homogeneous packing and improved sintering behavior. The low melting point of Co₂O₃ facilitated liquid-phasesintering at relatively low temperatures, and nearly full densification was achieved around 1350 °C. Stable black colorationwas also obtained over a wide additive range (5-35 wt%). These results demonstrate that black alumina ceramics withcontrolled optical and mechanical properties can be fabricated at relatively low temperatures through appropriate additiveselection and granulation processing.
Abstract
Electrostatic charge control and reflectance reduction are essential in semiconductor and display lithography processes. White alumina, an electrical insulator, often causes charge accumulation and light scattering, which can destabilize theseprocesses. To overcome these drawbacks, black alumina ceramics with high density and low reflectivity are required. In thisstudy, domestic alumina powder was mixed with additives mainly composed of Co₂O₃ and TiO₂, and the effects of additivecontent and sintering temperature on densification, hardness, reflectivity, and color were investigated. In particular, the roleof spray granulation was examined by comparing compacts prepared with and without granulation, revealing its importancein achieving homogeneous packing and improved sintering behavior. The low melting point of Co₂O₃ facilitated liquid-phasesintering at relatively low temperatures, and nearly full densification was achieved around 1350 °C. Stable black colorationwas also obtained over a wide additive range (5-35 wt%). These results demonstrate that black alumina ceramics withcontrolled optical and mechanical properties can be fabricated at relatively low temperatures through appropriate additiveselection and granulation processing.