메칠멜캅탄 가스센서용 TiO2/전해질폴리머 박막 제조
Fabrication of TiO2/polyelectrolyte thin film for a methyl mercaptan gas sensor
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초록
메칠멜캅탄(CH3SH) 가스를 검출하는 수정진동자(QCM) 가스센서를 QCM의 전극에 TiO2 나노입자와 전해질 폴리머를 증착하여 제조하였다. LBL-SA법에 의해 제조된 TiO2/PSS 박막은 높은 비표면적을 나타내었고, 가스센서의 감도를증가시켰다. 1.0 ppm의 농도를 갖는 메칠멜캅탄에 노출된 TEA 혹은 TiO2/PSS 막이 증착된 QCM의 주파수 변이는 각각 약9 Hz, 2 Hz 였다. (TiO2/PSS) 박막의 증착수가 늘어남에 따라 제조된 박막의 비표면적이 증가하게 되어 QCM 센서의 주파수 변이도 점차적으로 증가하였다. 추가적으로 메칠멜캅탄 가스의 농도가 0.5 ppm에서 2.0 ppm으로 높아짐에 따라 QCM 센서의 주파수 변화도 증가되었다. 본 연구에서는, (TiO2/PSS) 박막이 증착된 QCM 센서의 표면구조의 변화와 센서 특성을측정하였다.
Abstract
Quartz crystal microbalance (QCM) gas sensor to detect methyl mercaptan (CH3SH) gas was fabricated by depositing TiO2 nanoparticles and polyelectrolyte on the electrode of QCM. The TiO2/poly(sodium 4-styrenesulfonate) (PSS)thin film fabricated by a layer-by-layer self-assembly (LBL-SA) method showed a high surface area and increased the sensitivity of gas sensor. When the QCM sensors coated with triethanolamine (TEA) or (TiO2/PSS) were exposed to methyl mercaptan gas (1.0 ppm), the frequency shifts of QCM with TEA casting film and TiO2/PSS thin film were ca. 9 Hz and ca. 24 Hz, respectively. As the bilayer number of (TiO2/PSS) increased, the frequency shift of QCM sensor with (TiO2/PSS)thin film was gradually increased. In addition, the frequency shift of QCM sensor was gradually increased as the concentration of methyl mercaptan gas increased from 0.5 ppm to 2.0 ppm. In this study, the surface morphology and sensor property of QCM sensor coated with (TiO2/PSS) thin film were measured.
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