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유기금속화학기상증착법을 이용한 전이금속 칼코게나이드 단일층 및 이종구조 성장

Metal-organic Chemical Vapor Deposition of Uniform Transition Metal Dichalcogenides Single Layers and Heterostructures

신재혁|박원일|장수희
한국마이크로전자및패키징학회 (The Microelectronics And Packaging Society)|2020.12|마이크로전자 및 패키징학회지 (Jornal of the Microelectronics and Packaging Society)|제27권 제4호|pp. 119-125

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키워드

MoS2MOCVDWS2TMDCVertical heterostructuretwo-dimensional material
주제분류재료공학

초록

1.1~2.1eV의 직접 천이형 밴드갭을 가지는 전이금속 칼코게나이드(Transition Metal Dichalcogenide, TMDC) 는 빛에 대한 반응성이 크고 구조적 특징상 2차원 물질들과의 수직 이종접합구조를 형성하기 용이하다는 장점으로 차세대 광전소자와 반도체소자 물질로서 대두되고 있다. 하지만 TMDC를 얻는 공정들의 한계로 인해 고품질, 대면적의 수직이종접합구조의 형성에 어려움이 존재한다. 본 연구에서는 MOCVD 시스템을 제작하고, 단일층 TMDC 및 이들의 이종구조에 제조에 대한 연구를 수행하였다. 특히, 버블러 타입의 유기금속화합물 소스를 활용하여, 반응기 내로 유입되는 소스의 농도와 유량을 정밀하게 조절함으로써 전면적으로 균일한 박막을 얻을 수 있다. MOCVD로 MoS2, WS2 박막을 성장시키고 주사전자현미경, UV-visible spectrophotometer, Raman spectroscopy, photoluminescence 분석을 진행하여 균일한 박막을 성장시켰음을 확인하였다. 또한, MoS2 박막에 WS2 박막을 직접 성장시킴으로써 MoS2/WS2 수직 이종접합구조를 형성하였다.

Abstract

Transition metal dichalcogenides (TMDCs), two-dimensional atomic layered materials with direct bandgap in the range of 1.1-2.1 eV, have attracted a lot of research interest due to their high response to light and capability to build new types of artificial heterostructures. However, the large-area synthesis of high-quality and uniform TMDC films with vertical-stacked heterostructure still remains challenge. In this study, we have developed a metal-organic chemical vapor deposition (MOCVD) system for TMDCs and conducted a systematic study on the growth of single-layer TMDCs and their heterostructures. In particular, using a bubbler-type organometallic compound sources, the concentration and flow rate of each source can be precisely controlled to obtain uniformly single-layered MoS2 and WS2 films over the centimeter scale. In addition, the MoS2/WS2 vertical heterostructure was achieved by growing WS2 film directly on the MoS2 film, as confirmed by electron microscopy, UV-visible spectrophotometer, Raman spectroscopy, and photoluminescence spectroscopy.

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