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Development of Dark Field image Processing Technique for the Investigation of Nanostructures

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주제분류금속공학

초록

We propose a custom analysis technique for the dark field (DF) image based on transmission electron microscopy (TEM). The custom analysis technique is developed based on the DigitalMicrograph® (DM) script language embedded in the Gatan digital microscopy software, which is used as the operational software for most TEM instruments. The developed software automatically scans an electron beam across a TEM sample and records a series of electron diffraction patterns. The recorded electron diffraction patterns provide DF and ADF images based on digital image processing. An experimental electron diffraction pattern is recorded from a IrMn polycrystal consisting of fine nanograins in order to test the proposed software. We demonstrate that the developed image processing technique well resolves nanograins of ~ 5 nm in diameter.

Abstract

We propose a custom analysis technique for the dark field (DF) image based on transmission electron microscopy (TEM). The custom analysis technique is developed based on the DigitalMicrograph® (DM) script language embedded in the Gatan digital microscopy software, which is used as the operational software for most TEM instruments. The developed software automatically scans an electron beam across a TEM sample and records a series of electron diffraction patterns. The recorded electron diffraction patterns provide DF and ADF images based on digital image processing. An experimental electron diffraction pattern is recorded from a IrMn polycrystal consisting of fine nanograins in order to test the proposed software. We demonstrate that the developed image processing technique well resolves nanograins of ~ 5 nm in diameter.

참고문헌 (7)

  1. K. H. Kim, , Ultramicroscopy, 124, pp.71~ (2013)
  2. 김규현, "DigitalMicrograph Script Source Listing for a Geometric Phase Analysis", 한국현미경학회지, 45(2), pp.101~105 (2015), 한국현미경학회
  3. J. M. Zuo, , Science, 300, pp.1419~ (2003)
  4. H. Kim, , J. Appl. Phys., 113, pp.103511~ (2013)
  5. M. Hÿtch, , Ultramicroscopy, 74, pp.131~ (1998)
  6. P. Galindo, , Ultramicroscopy, 107, pp.1186~ (2007)
  7. K. H. Kim, , Micron, 71, pp.39~ (2015)

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