반도체 광원을 위한 나노 프레임 구조 및 공정 개발
Nano Frame Structure and Process for Semiconductor Light Source
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Abstract : Light emitting structures and processes have been studied to improve the optical properties and efficiency of micro sized light emitting diodes, which are used as important light sources in semiconductor lighting and displays. However, this development direction and method is based on a planar structure and research and development has been carried out based on this structure. The current study presents a three dimensional nano structure using a nano frame which is different from a planar structure and a nano size process using micro patterning and reactive etching methods. Additionally, a semiconductor light source with nano structures is proposed through nano pillar structure formed through a nano frame.
Abstract
Abstract : Light emitting structures and processes have been studied to improve the optical properties and efficiency of micro sized light emitting diodes, which are used as important light sources in semiconductor lighting and displays. However, this development direction and method is based on a planar structure and research and development has been carried out based on this structure. The current study presents a three dimensional nano structure using a nano frame which is different from a planar structure and a nano size process using micro patterning and reactive etching methods. Additionally, a semiconductor light source with nano structures is proposed through nano pillar structure formed through a nano frame.