중간층이 DLC 코팅에 미치는 영향
The Effects of Interlayer on the DLC Coating
2
조회
0
다운로드
4
인용
0
참고문헌
키워드
초록
DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. The properties of interlayer between the substrate and the DLC film were studied. Arc ion plating method have been employed to deposit onto substrate and sputtering method was used for synthesizing DLC onto interlayer. Among these six types of interlayer, deposited DLC film onto TiCN showed excellent value for characteristics. From the results of analysis for physical properties of DLC films, it seems that the adhesion forces were more important factors than intrinsic mechanical properties such as hardness, roughness and wear resistance of DLC films. AFM(Atomic Force Microscope) was used for understanding roughness of DLC films. Hardnesses of the coating layers were identified by nano-indentation method and adhesions were checked by scratch method.
Abstract
DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. The properties of interlayer between the substrate and the DLC film were studied. Arc ion plating method have been employed to deposit onto substrate and sputtering method was used for synthesizing DLC onto interlayer. Among these six types of interlayer, deposited DLC film onto TiCN showed excellent value for characteristics. From the results of analysis for physical properties of DLC films, it seems that the adhesion forces were more important factors than intrinsic mechanical properties such as hardness, roughness and wear resistance of DLC films. AFM(Atomic Force Microscope) was used for understanding roughness of DLC films. Hardnesses of the coating layers were identified by nano-indentation method and adhesions were checked by scratch method.
참고문헌 (19)
- W. K. Halnan, "Coating for High Temperature Applications", pp.25~ (1983), Applied Science Publishers
- J. Robertson, , Surf. Coatings Technol, 50, pp.185~ (1992)
- J. Robertson, , Adv. Phys, 35, pp.317~ (1986)
- P. Koidl, , Master. Sci. Forum, 통권 : 52, pp.41~ (1990)
- H. Tsai, , J. Vac. Sci. Technol. A, 5, pp.3287~ (1987)
- D. R. McKenzie, , Rep. Prog.. Phys, 59, pp.1611~ (1996)
- Y. Lifshitz, , Diamond Rel. Master, 5, pp.388~ (1996)
- Y. Lifshitz, , Diamond Rel. Master, 8, pp.1659~ (1999)
- A. A. Voevodin, , Surf. Coatings Technol, 82, pp.199~ (1996)
- S. R. P. Silva, "Handbook of Thin Film Materials" (2002), Academic Press
- J. C. Andus, , Science, 241, pp.913~ (1988)
- S. Aigenberg, , J. Appl. Phys, 42, pp.2953~ (1971)
- L. Karson, , Thin Solid Films, 371, pp.167~ (2000)
- W. Fang, , Sensors and Actuators, 84, pp.310~ (2000)
- E. Uhlmann, , Surf. Coatings Technol, 131, pp.448~ (2000)
- E. Harry, , Surf. Coat. Technol, 125, pp.185~ (2000)
- J. Robertson, , Mater. Sci. Eng, R37, pp.129~ (2000)
- 전영숙, "PECVD로 증착된 금속층을 포함하는 DLC 박막의기계적 특성 분석", 전기전자재료학회논문지, 19(7), pp.631~635 (2006), 한국전기전자재료학회
- M. M. Morshed, , J. Mater. Process. Tech, 141, pp.127~ (2003)