3D 형상 측정용 고속/고정밀 멀티프로브 측정시스템 개발
Development of High Speed/High Precision Multi Probe Measurement System for 3D Image Measurement
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초록
The necessity of large-area and high-precision measurements has increased in industry area. Thehigh-speed/high-precision multi probe measurement system has been developed to measure the 3D shape. The three different multi probes are combined in measurement system. This system is synchronizedbetween the probes to measure the same position in the sample. Also this paper shows the measurementresults with multi probe measurement system.
Abstract
The necessity of large-area and high-precision measurements has increased in industry area. Thehigh-speed/high-precision multi probe measurement system has been developed to measure the 3D shape. The three different multi probes are combined in measurement system. This system is synchronizedbetween the probes to measure the same position in the sample. Also this paper shows the measurementresults with multi probe measurement system.
참고문헌 (5)
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- Takashi KODAMA, "Development of confocal laser scanning microscope", atomic force microscope system for force curve measurement, 2004, pp.43(7B), ~
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- 김정현, "Cross Hinge 구조를 이용한 나노 정밀 압전 소자 모션 스테이지의 설계", 한국기계기술학회지, 14(1), pp.7~12 (2012), 한국기계기술학회