Density control of ZnO nanorod arrays using ultrathin seed layer by atomic layer deposition
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We investigated the effect of ZnO seed layer thickness on the density of ZnO nanorod arrays. ZnO has been deposited usingtwo distinct processes consisting of the seed layer deposition using ALD and subsequent hydrothermal ZnO growth. Due tothe coexistence of the growth and dissociation during ZnO hydrothermal growth process on the seed layer, the thickness ofseed layer plays a critical role in determining the nanorod growth and morphology. The optimized thickness resulted in theregular ZnO nanorod growth. Moreover, the introduction of ALD to form the seed layer facilitates the growth of the nanorodson ultrathin seed layer and enables the densification of nanorods with a narrow change in the seed layer thickness. This studydemonstrates that ALD technique can produce densely packed, virtually defect-free, and highly uniform seed layers and twodistinctive processes may form ZnO as the final product via the initial nucleation step consisting of the reaction between Zn2+ions from respective zinc precursors and OH− ions from H2O.
Abstract
We investigated the effect of ZnO seed layer thickness on the density of ZnO nanorod arrays. ZnO has been deposited usingtwo distinct processes consisting of the seed layer deposition using ALD and subsequent hydrothermal ZnO growth. Due tothe coexistence of the growth and dissociation during ZnO hydrothermal growth process on the seed layer, the thickness ofseed layer plays a critical role in determining the nanorod growth and morphology. The optimized thickness resulted in theregular ZnO nanorod growth. Moreover, the introduction of ALD to form the seed layer facilitates the growth of the nanorodson ultrathin seed layer and enables the densification of nanorods with a narrow change in the seed layer thickness. This studydemonstrates that ALD technique can produce densely packed, virtually defect-free, and highly uniform seed layers and twodistinctive processes may form ZnO as the final product via the initial nucleation step consisting of the reaction between Zn2+ions from respective zinc precursors and OH− ions from H2O.
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