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Experimental and numerical investigation on in-flight synthesis of Ga-doped ZnO nano-powder by Radio-Frequency induction plasma

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In this work, in-flight synthesis route of Ga doped ZnO (GZO) nano-powders was investigated experimentally andnumerically, using Radio-Frequency (RF) induction plasmas. For experimental study, mixture of micron-sized ZnO and Ga2O3powders were treated by RF induction plasmas, then, the as-treated powders were retrieved from reactor bottom and filtrationfor characterization. For numerical study, single particle model was combined with two-dimensional simulation code of RFinduction plasma to predict the particle behaviors of ZnO and Ga2O3 depending on their sizes. First, experimental resultsshowed that filtration-retrieved powders were characterized as GZO nano-powders although gallium content can be decreaseddue to Ga2O3 decomposition into sub-oxides at the elevated temperatures. From reactor bottom, however, spherical structuresconsisting of Ga2O3 and ZnO particles were observed in sub-millimeter sizes. Numerical results predicted that micron-sized(≤ 10 μm) ZnO and Ga2O3 particles can vaporize easily during the flight of plasma, while particles with the sizes of 25~100um were simulated to be partially evaporated or unevaporated. Comparing these experimental and numerical results indicatesthat GZO nano-powders can be synthesized from vapor species of ZnO and Ga2O3, which are primarily produced by in-flighttreatment of micron-sized ZnO and Ga2O3 powders in RF induction plasmas.

Abstract

In this work, in-flight synthesis route of Ga doped ZnO (GZO) nano-powders was investigated experimentally andnumerically, using Radio-Frequency (RF) induction plasmas. For experimental study, mixture of micron-sized ZnO and Ga2O3powders were treated by RF induction plasmas, then, the as-treated powders were retrieved from reactor bottom and filtrationfor characterization. For numerical study, single particle model was combined with two-dimensional simulation code of RFinduction plasma to predict the particle behaviors of ZnO and Ga2O3 depending on their sizes. First, experimental resultsshowed that filtration-retrieved powders were characterized as GZO nano-powders although gallium content can be decreaseddue to Ga2O3 decomposition into sub-oxides at the elevated temperatures. From reactor bottom, however, spherical structuresconsisting of Ga2O3 and ZnO particles were observed in sub-millimeter sizes. Numerical results predicted that micron-sized(≤ 10 μm) ZnO and Ga2O3 particles can vaporize easily during the flight of plasma, while particles with the sizes of 25~100um were simulated to be partially evaporated or unevaporated. Comparing these experimental and numerical results indicatesthat GZO nano-powders can be synthesized from vapor species of ZnO and Ga2O3, which are primarily produced by in-flighttreatment of micron-sized ZnO and Ga2O3 powders in RF induction plasmas.

참고문헌 (28)

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