실리콘 태양전지의 피라미드와 반구형 표면 조직화
Pyramid and Half-Sphere Type of Surface Texturing for Si-Solar Cell
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초록
In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about 1 pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.
Abstract
In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about 1 pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.
참고문헌 (9)
- J. S. Lee, "Solar cell engineering", 22~28 (2007)
- H. O. Jumg, "Improvement of silicon solar cell efficiency according to pyramid structure and antireflection coating process condition", 석사, pp.2013
- Y. Inomate, "Surface texturing of large area multi crystalline silicon solar cells using reactive ion etching method", Solar Energy Materials and Solar Cell, 48, pp.237~242 (1997)
- H. F. W. Dekkers, "Silicon surface texturing by reactive ion etching", Opto-electronics review, 8, pp.311~316 (2000)
- V. Y. Yerokhov, "Cost-effective methods of texturing for silicon solar cells", Solar Energy Materials & Solar Cells, 72, pp.291~298 (2002)
- T. Juvonen, "High efficiency single crystalline silocon solar cells", Physica Scripta, T101(98), pp.96~98 (2002)
- B. O. Cho, "Direct pattern etching for micromachining applications without the use of a resist mask", J. Vac. Sci Technol. B, 18, pp.2769~2773 (2000)
- G. Y. Yeum, "Plasma etching technique", 249~264 (2006)
- J. S. Yoo, "Black silicon layer formation for application in solar cells", Solar Energy Materials & Solar Cells, 90, pp.3085~3093 (2006)