유연성 높은 캔틸레버 제작을 위한 스프레이 코팅 방법 연구
Study of Manual Spray Coating Method for Fabricating Flexible Cantilever
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Con- ventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the deviceis manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, thecommercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the acces- sories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with thecapable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spraycoating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.
Abstract
This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Con- ventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the deviceis manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, thecommercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the acces- sories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with thecapable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spraycoating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.
참고문헌 (10)
- 은덕수, "Photoresist Spray Coating for Resist Film Performance of Deep Silicon Cavities", Journal of the Korean Physical Society, 50(6), pp.1947~1951 (2007), 한국물리학회
- Nithi Atthi, "Improvement of Photoresist Film Coverage on High Topology Surface with Spray Coating Technique", J. Microscopy Society of Thailand, 24(1), pp.42~46 (2010)
- T. Luxbacher, "Spray Coating for MEMS, Interconnects, and Advanced Packaging Applications", Sensors, 16(7), pp.61~64 (1999)
- N. Pham, "Direct spray coating of photoresist-a new method for patterning 3-D structures", Eurosensors XVI, pp.182~185 (2002)
- Liming Yu, "Spray Coating of Photoresist for 3D Microstructures with Different Geometries", J. Physics : Conference Series, 34, pp.937~942 (2006)
- Zhe Wang, "Fabrication of cellulose nanofiber-based ultrafiltration membranes by spray coating approach", J. Appl. Polym. Sci, 134, pp.44583~ (2017)
- U. Staudinger, "Properties of thin layers of electrically conductive polymer", MWCNT composites prepared by spray coating, 2017, pp.138, 134~143
- Jin Xiao, "Fabrication and characterization of BaZr0. 1Ce0. 7Y0. 2O3-δ based anode supported solid oxide fuel cells by tape casting combined with spray coating", Materials Letters, 189, pp.192~195 (2017)
- Jiseop Hwang, "Enancement of washcoat adhesion for SCR catalysts to convert nitrogen oxide using powder spray coating of TiO2on metallic honeycomb substrate", Catalysis Communications, 94, pp.1~4 (2017)
- Mohammad Nur E Alam Al Nasim, "Formation of few-layer graphene flake structures from graphite particles during thin film coating using dry spray deposition method", Thin Solid Films, 622, pp.34~40 (2017)