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Facile Fabrication of Micro-scale Photomask and Microfluidic Channel Mold for Sensor Applications Using a Heat-shrink Polymer

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초록

In this study, a prototype micro-scale photomask and microfluidic channel mold were fabricated using the thermal shrinkage of thepolymer. A polystyrene (PS) sheet was used as the heat-shrink polymer, and the patterns of the photomask and microchannel are interdigitatedelectrodes. Patterns were formed on the PS sheets using a commercial laser printer. The contraction ratio of the PS sheet wasapproximately 60% at a temperature of 150oC, and the transmittance was reduced by approximately 0% at a wavelength of 365 nm. The microfluidic channel had a round shape. The proposed technique is simple, facile, and inexpensive for fabricating a micro-scale photomaskand microfluidic channel mold and does not involve the use of any harmful materials. Thus, this technique is well-suited forfabricating diverse micro-scale patterns and channels for prototype devices, including sensors.

Abstract

In this study, a prototype micro-scale photomask and microfluidic channel mold were fabricated using the thermal shrinkage of thepolymer. A polystyrene (PS) sheet was used as the heat-shrink polymer, and the patterns of the photomask and microchannel are interdigitatedelectrodes. Patterns were formed on the PS sheets using a commercial laser printer. The contraction ratio of the PS sheet wasapproximately 60% at a temperature of 150oC, and the transmittance was reduced by approximately 0% at a wavelength of 365 nm. The microfluidic channel had a round shape. The proposed technique is simple, facile, and inexpensive for fabricating a micro-scale photomaskand microfluidic channel mold and does not involve the use of any harmful materials. Thus, this technique is well-suited forfabricating diverse micro-scale patterns and channels for prototype devices, including sensors.

참고문헌 (9)

  1. T. Arakawa, "Biosensors and chemical sensors for healthcare monitoring : A review", IEEJ Trans. Electr. Electron. Eng, 17(5), pp.626~636 (2022)
  2. Y. Zhang, "PDMS-based microfluidic devices with shrinkable wax molds printed on biaxially orientated polystyrene film", Mater. Res. Express, 6(7), pp.075329(1)~075329(7) (2019)
  3. A. C. Roy, "On chip optofluidic low-pressure monitoring device", J. Biophotonics, 14(3), pp.e202000381~e202000381(13) (2020)
  4. W. He, "Progress of shrink polymer micro-and nanomanufacturing", Microsyst. Nanoeng., 7, pp.88(1)~88(23) (2021)
  5. S. Dwivedi, "MEMS and Microfluidics in Healthcare", pp.101~141 (2023), Springer
  6. X. Song, "UV-micropatterned miniaturization: rapid in situ photopatterning and miniaturization of microscale features on shrinkable thermoplastics", Adv. Mater. Technol., 5(6), pp.2000146(1)~200146(7) (2020)
  7. M. R. A. Fuaad, "Microactuators technologies for biomedical applications", Microsyst. Technol., 29, pp.953~984 (2023)
  8. M. Humood, "Fabrication and Mechanical Cycling of Polymer Microscale Architectures for 3D MEMS Sensors", Adv. Eng. Mater., 21(3), pp.1801254(1)~1801254(10) (2019)
  9. G. G. Morbioli, "A practical guide to rapid-prototyping of PDMS-based microfluidic devices : A tutorial", Anal. Chim. Acta, 1135, pp.150~174 (2020)

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