산소결핍 탄탈륨 산화물을 활용한 탄탈륨 산질화물 및 질화물 합성
ynthesis of Tantalum Oxy-nitride and Nitride usingOxygen Dificiency Tantalum Oxides
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Colored tantalum oxy-nitride (TaON) and tantalum nitride (Ta3N5) were synthesized by ammonolysis. Oxygen deficient tantalum oxides (TaO1.7) were produced by a titration process, using a tantalum chloride (TaCl5) precursor. The stirring speed and the amount of NH4OH were important factors for controling the crystallinity of tantalum oxides. The high crystallinity of tantalum oxides improved the degree of nitridation which was related to the color value. Synthesized powders were characterized by XRD, SEM, TEM and Colorimeter.
Abstract
Colored tantalum oxy-nitride (TaON) and tantalum nitride (Ta3N5) were synthesized by ammonolysis. Oxygen deficient tantalum oxides (TaO1.7) were produced by a titration process, using a tantalum chloride (TaCl5) precursor. The stirring speed and the amount of NH4OH were important factors for controling the crystallinity of tantalum oxides. The high crystallinity of tantalum oxides improved the degree of nitridation which was related to the color value. Synthesized powders were characterized by XRD, SEM, TEM and Colorimeter.
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