나노인덴테이션을 이용한 MLCC용 BaTiO3 세라믹스의 기계적 물성평가
Feasibility Test for Mechanical Property Characterization of BaTiO3 Ceramics for MLCC Application Using Nanoindentation
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In this study, the feasible test for the mechanical property characterization of BaTiO3 ceramics and multi-layer ceramic capacitor (MLCC) was performed with nanoindentation technique. In case of BaTiO3 ceramics, hardness and elastic modulus are dependent on the densification of specimen showing the highest hardness and elastic modulus values of 12.3 GPa and 155 GPa, respectively at 1260℃. In case of MLCC chip, hardness of dielectric layer was lower than that of margin region. The nanoindentation method could be useful tool for the measurement of mechanical property within BaTiO3 dielectric layer of very thin thickness in high capacitance MLCC.
Abstract
In this study, the feasible test for the mechanical property characterization of BaTiO3 ceramics and multi-layer ceramic capacitor (MLCC) was performed with nanoindentation technique. In case of BaTiO3 ceramics, hardness and elastic modulus are dependent on the densification of specimen showing the highest hardness and elastic modulus values of 12.3 GPa and 155 GPa, respectively at 1260℃. In case of MLCC chip, hardness of dielectric layer was lower than that of margin region. The nanoindentation method could be useful tool for the measurement of mechanical property within BaTiO3 dielectric layer of very thin thickness in high capacitance MLCC.
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