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ReRAM 소자의 비정질물질 Ag도핑에 따른 특성 향상에 대한 연구

Improving Uniformity of ReRAM Devices by Ag-Nanocrystal Doping

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주제분류과학기술학

초록

The most popular devices in next-generation computer memory technology are the phase change RAM (PRAM), nano-floating gate memory (NFGM), resistance RAM (ReRAM), polymer RAM (PoRAM), magnetic RAM (MRAM), and molecular electronic devices. Amongst these, ReRAM is the most-researched candidate for nonvolatile memory technologies due to its simple metal-insulator-metal (MIM) structure and excellent operational characteristics. However, it faces obstacles such as high production costs and insufficient uniformity. This study aims to tackle the latter problem by spin-coating Ag nanoparticles on the upper electrode to improve the uniformity characteristics.

Abstract

The most popular devices in next-generation computer memory technology are the phase change RAM (PRAM), nano-floating gate memory (NFGM), resistance RAM (ReRAM), polymer RAM (PoRAM), magnetic RAM (MRAM), and molecular electronic devices. Amongst these, ReRAM is the most-researched candidate for nonvolatile memory technologies due to its simple metal-insulator-metal (MIM) structure and excellent operational characteristics. However, it faces obstacles such as high production costs and insufficient uniformity. This study aims to tackle the latter problem by spin-coating Ag nanoparticles on the upper electrode to improve the uniformity characteristics.

참고문헌 (5)

  1. 김장한, "Ge25Se75-based ReRAM 소자의 전계에 의한 저항 변화에 대한 연구", 전기전자재료학회논문지, 25(3), pp.182~186 (2012), 한국전기전자재료학회
  2. C. Y. Lin, "Improvement of Resistive Switching Properties in ZrO 2 -Based ReRAM With Implanted Ti Ions", IEEE Electron Device Lett, 30, pp.1335~1341 (2009)
  3. D. Wang, , Appl. Phys. Lett, 98, pp.109~115 (2011)
  4. G. I. Meijer, , Science, 319, pp.1625~1334 (2018)
  5. H. H. Lee, , Nanotechnology, 16, pp.2436~2449 (2005)

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