방사선 검출용 화합물 반도체 웨이퍼의 성분 분석을 위한 XRF 자동화 매핑 시스템 개발
Development of an X-ray Fluorescence Automation System for Components Analysis of Compound Semiconductor Wafers
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A new XRF automation system is developed to analyze the components of compoundsemiconductors such as CdTe and CdZnTe, which are currently manufactured. The systemconsists of an X-ray generator, a Si-PIN based X-ray detector module, two stepping motors thatcan be moved in two axes, a Z-axis stage that can be adjusted manually, a motor controller, anda lead shielded container. We implemented a XRF data acquisition software to control the motor,and acquire the XRF spectrum at each pixel. Up to 3-inch in diameter sample can be mountedon the sample holder. An XRF spectrum was obtained using a our CdZnTe wafer fabricatedwith Bridgman method, and elemental distributions of Cd, Zn, and Te on the wafer surface weremapped successfully.
Abstract
A new XRF automation system is developed to analyze the components of compoundsemiconductors such as CdTe and CdZnTe, which are currently manufactured. The systemconsists of an X-ray generator, a Si-PIN based X-ray detector module, two stepping motors thatcan be moved in two axes, a Z-axis stage that can be adjusted manually, a motor controller, anda lead shielded container. We implemented a XRF data acquisition software to control the motor,and acquire the XRF spectrum at each pixel. Up to 3-inch in diameter sample can be mountedon the sample holder. An XRF spectrum was obtained using a our CdZnTe wafer fabricatedwith Bridgman method, and elemental distributions of Cd, Zn, and Te on the wafer surface weremapped successfully.
참고문헌 (4)
- Bearden JA, "X-ray Wavelengths", Rev. Mod. Phys, 39, pp.78~124 (1967)
- Friedman H, "A Geiger Counter Spectrometer for X-ray Fluorescence Analysis", Rev. Sci. Instrum, 19, pp.323~330 (1948)
- James RB, "Semiconductors for Room Temperature Nuclear Detector Applications", pp.341~ (1995), Elsevier, Academic Press
- Nelms SM, "ICP-MS Spectroscopy Handbook" (2005), Blackwell Publishing