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인쇄회로기판 검사를 위한 단일조사 이중에너지 엑스선 영상기법의유용성에 관한 연구

Feasibility of Single-Shot Dual-Energy X-ray Imaging Technique for Printed-Circuit Board Inspection

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초록

A single-shot dual-energy x-ray imaging technique has been developed using a sandwichdetector by stacking two detectors, in which the front and rear detectors respectively producerelatively lower and higher x-ray energy images. Each detector layer is composed of a phosphorscreen coupled with a photodiode array. The front detector layer employs a thinner phosphorscreen, whereas the rear detector layer employs a thicker phosphor screen considering thequantum efficiency for x-ray photons with higher energies. We have applied the proposed methodinto the inspection of printed circuit boards, and obtained dual-energy images with backgroundclutter suppressed. In addition, the single-shot dual-energy method provides sharper-edge imagesthan the conventional radiography because of the unsharp masking effect resulting from the useof different thickness phosphors between the two detector layers. It is promising to use the singleshotdual-energy x-ray imaging for high-resolution nondestructive testing. For the reliable use ofthe developed method, however, more quantitative analysis is further required in comparisonswith the conventional method for various types of printed circuit boards.

Abstract

A single-shot dual-energy x-ray imaging technique has been developed using a sandwichdetector by stacking two detectors, in which the front and rear detectors respectively producerelatively lower and higher x-ray energy images. Each detector layer is composed of a phosphorscreen coupled with a photodiode array. The front detector layer employs a thinner phosphorscreen, whereas the rear detector layer employs a thicker phosphor screen considering thequantum efficiency for x-ray photons with higher energies. We have applied the proposed methodinto the inspection of printed circuit boards, and obtained dual-energy images with backgroundclutter suppressed. In addition, the single-shot dual-energy method provides sharper-edge imagesthan the conventional radiography because of the unsharp masking effect resulting from the useof different thickness phosphors between the two detector layers. It is promising to use the singleshotdual-energy x-ray imaging for high-resolution nondestructive testing. For the reliable use ofthe developed method, however, more quantitative analysis is further required in comparisonswith the conventional method for various types of printed circuit boards.

참고문헌 (9)

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