유연성 소자용 금속 전극의 신뢰성 연구 동향
Reliability of Metal Electrode for Flexible Electronics
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Recently, various types of flexible devices such as flexible displays, batteries, e-skins and solar cell panelshave been reported. Most of the researches focus on the development of high performance flexible device. However, torealize these flexible devices, the long-term reliability should be guaranteed during the repeated deformations of flexibledevices because the direct mechanical stress would be applied on the electronic devices unlike the rigid Si-based devices. Among various materials consisting electronics devices, metal electrode is one of the weakest parts against mechanicaldeformation because the mechanical and electrical properties of metal films degrade gradually due to fatigue damageduring repeated deformations. This article reviews the researches of fatigue behavior of thin metal film, and introducesthe methods to enhance the reliability of metal electrode for flexible device.
Abstract
Recently, various types of flexible devices such as flexible displays, batteries, e-skins and solar cell panelshave been reported. Most of the researches focus on the development of high performance flexible device. However, torealize these flexible devices, the long-term reliability should be guaranteed during the repeated deformations of flexibledevices because the direct mechanical stress would be applied on the electronic devices unlike the rigid Si-based devices. Among various materials consisting electronics devices, metal electrode is one of the weakest parts against mechanicaldeformation because the mechanical and electrical properties of metal films degrade gradually due to fatigue damageduring repeated deformations. This article reviews the researches of fatigue behavior of thin metal film, and introducesthe methods to enhance the reliability of metal electrode for flexible device.
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