전력반도체 패키징을 위한 Transient liquid phase 접합 기술
Trasient Liquid Phase bonding for Power Semiconductor
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Recently, a demand in sustainable green technologies is requiring the lead free bonding for high power module packaging due to the environmental pollution. The Transient-liquid phase (TLP) bonding can be a good alternative to a high Pb-bearing soldering. Basically, TLP bonding is known as the combination of soldering and diffusion bonding. Since the low melting temperature material is fully consumed after TLP bonding, the remelting temperature of joint layer becomes higher than the operating temperature of the power module. Also, TLP bonding is cost-effective process than metal nanopaste bonding such as Ag. In this paper, various TLP bonding techniques for power semiconductor were described.
Abstract
Recently, a demand in sustainable green technologies is requiring the lead free bonding for high power module packaging due to the environmental pollution. The Transient-liquid phase (TLP) bonding can be a good alternative to a high Pb-bearing soldering. Basically, TLP bonding is known as the combination of soldering and diffusion bonding. Since the low melting temperature material is fully consumed after TLP bonding, the remelting temperature of joint layer becomes higher than the operating temperature of the power module. Also, TLP bonding is cost-effective process than metal nanopaste bonding such as Ag. In this paper, various TLP bonding techniques for power semiconductor were described.
참고문헌 (35)
- R. Khazaka, "Survey of High-Temperature Reliability of Power Electronics Packaging Components", IEEE Transactions on Power Electronics, 30(5), pp.2456~ (2015)
- Z. Liang, "Status and Trend of Automotive Power Module Packaging", Proc. 24th International Symposium on Power Semiconductor Devices & ICs, Bruge, Belgium, 325 (2012)
- J. Millan, "A Review of WBG Power Semiconductor Devices", Proc. International Semiconductor Conference(CAS), 57 (2012)
- 김광석, "파워디바이스 패키징의 열제어 기술과 연구 동향", 마이크로전자 및 패키징학회지, 20(2), pp.13~21 (2014), 한국마이크로전자및패키징학회[DOI]
- 노명훈, "자동차용 파워 모듈 패키징의 은 소재를 이용한 접합 기술", 마이크로전자 및 패키징학회지, 22(4), pp.15~23 (2015), 한국마이크로전자및패키징학회
- A. Kroupa, "Current Problems and Possible Solutions in High-Temperature Lead-Free Soldering", Journal of Materials Engineering and Performance, 21(5), pp.629~ (2012)
- M. Nahavandi, "Effects of Silver and Antimony Content in Lead-free Hig-temperature Solders of Bi-Ag and Bi-Sb on Copper Substrate", Journal of Electronic Materials, 43(2), pp.579~ (2014)
- T. Yamakawa, "Influence of Joining Conditions on Bonding Strength of Joints: Efficacy of Low-temperature Bonding using Cu Nanoparticle Paste", Journal of Electronic Materials, 42(6), pp.1260~ (2013)
- K. S. Moon, "Thermal Behavior of Silver Nanoparticles for Low-Temperature Interconnect Applications", Journal of Electronic Materials, 34(2), pp.168~ (2005)
- Y. Akada, "Interfacial Bonding Mechanism using Silver Metallo-Organic Nanoparticles to Bulk Metals and Observation of Sintering Behavior", Materials Transactions, 49(7), pp.1537~ (2008)
- T. A. Tollefsen, "Aasmundtveit, High Temperature Interconnect and Die Attach Technology: Au-Sn SLID Bonding", IEEE Transactions on Components, Packaging and Manufacturing Technology, 3(6), pp.904~ (2013)
- R. I. Rodriguez, "Thermal Stability Characterization of the Au-Sn Bonding for High-Temperature Applications", IEEE Transactions on Components, Packaging and Manufacturing Technology, 3(4), pp.549~ (2013)
- A. Sharif, "Transient Liquid Phase Ag-Based Solder Technology for High-Temperature Packaging Applications", Journal of Alloys and Compounds, 587, pp.365~ (2014)
- A. Lis, "Effect of Process and Service Conditions on TLP-Bonded Components with (Ag, Ni-)Sn Interlayer Combinations", Journal of Electronic Materials, 44(11), pp.4576~ (2015)
- M. H. Roh, "Pressureless Bonding by Micro-Sized Silver Particle Paste for High-Temperature Electronic Packaging", Materials Transactions, 57(7), pp.1209~ (2016)
- H. A. Mustain, "Transient Liquid Phase Die Attach for High-Temperature Silicon Carbide Power Devices", IEEE Transactions on Components and Packaging Technology, 33(3), pp.563~ (2010)
- J. F. Li, "Suitable Thicknesses of Base Metal and Interlayer, and Evolution of Phases for Ag", Sn, Journal of Electronic Materials, pp.2014, 43(4)[DOI]
- K. Chu, "A Comparative Study of Cn", Sn, Sn, pp.Ni Solder Joints for Low Temperature Stable Transient Liquid Phase Bonding, Scripta Materialia[DOI]
- S. W. Yoon, "Nickel–Tin Transient Liquid Phase Bonding Toward High-Temperature Operational Power Electronics in Electrified Vehicles", IEEE Transactions on Power Electronics, 28(5), pp.2448~ (2013)
- N. S. Bosco, "Critical Interlayer Thickness for Transient Liquid Phase Bonding in the Cu–Sn System", Acta Materialia, 52, pp.2965~ (2004)
- J. F. Lynch, "Brazing by the Diffusion Controlled Formation of a Liquid Intermediate Phase", Weld J, 38, pp.85s~ (1959)
- W. A. Owczarski, "Eutectic Brazing of Zircalloy 2 to Type 304 Stainless Steel", Weld J, 42, pp.78~ (1962)
- L. Bernstein, "Semiconductor Joining by Solid-Liquid-Interdiffusion (Slid) Process .1. Systems Ag-In, Au-In, and Cu-In", J. Electrochem. Soc, 113, pp.1282~ (1966)
- L. Bernstein, "Applications of Solid-Liquid Interdiffusion (Slid) Bonding in Integrated-Circuit Fabrication", Trans. Metall. Min. Soc (Aime), 236, pp.405~ (1966)
- D. Paulonis, "Diffusion bonding utilizing transient liquid phase", US Patent US3678570A, ~ (1972)
- J. F. Li, "Interfacial Reaction in Cu", Sn, Acta Mater, pp.2011, 59[DOI]
- R. Labie, "Solid State Diffusion in Cu-Sn and Ni-Sn Diffusion Couples with Flip-Chip Scale Dimensions", Intermetallics, 15, pp.396~ (2007)
- J. Y. Song, "Effects of Reactive Diffusion on Stress Evolution in Cu-Sn Films", Scripta Mater, 51, pp.167~ (2004)
- A. Lis, "High Power Electronics Packaging by Transient Liquid Phase bonding", Doctor, pp.2015
- H. H. Hsu, "Evolution of the Intermetallic Compounds in Ni", Sn-2.5Ag, Journal of electronic Materials, pp.2015, 44(10)[DOI]
- X. Liu, "Thermally Stable Cu3Sn", Cu Composite Joint for High-Temperature Power Device, 2016, pp.110, 101~
- T. Ishizaki, "Pressurelss Bonding by Use of Cu and Sn Mixed Nanoparticles", Journal of Electronic Materials, 43(12), pp.4413~ (2014)
- A. Sharif, "Transient Liquid Phase Ag-based Solder Technology for High-Temperature Packaging Applications", Journal of Alloys and Compounds, 587, pp.365~ (2014)
