주석-니켈 마이크로 분말을 이용한 EV 전력모듈용 천이액상 소결 접합
Transient Liquid Phase Sinter Bonding with Tin-Nickel Micro-sized Powders for EV Power Module Applications
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초록
본 연구에서는 고온 대응 EV (Electric Vehicle) 전력반도체 칩 접합용 Sn-Ni 페이스트의 제조 및 특성 평가 연구가 수행되었다. Sn-Ni 페이스트의 Sn과 Ni 함량에 따른 TLPS (Transient Liquid Phase Sintering) 접합부 미세 조직 변화 관찰 결과, Sn-20Ni (in wt.%)의 경우에는 Ni 분말의 부족, 그리고 Sn-50Ni의 경우에는 Ni 분말의 과다 포함에 따른Ni 뭉침 현상이 관찰되었다. Sn-30Ni과 Sn-40Ni의 경우에는 TLPS 접합 공정 후 상대적으로 치밀한 접합부 단면 미세 구조 조직을 가짐을 확인하였다. TLPS 접합 공정 후 접합부 시편의 DSC 열 분석 결과로부터 TLPS 접합 공정 반응 동안Sn과 Ni의 충분한 반응이 일어남을 확인하였으며, 접합 공정 후 접합부에는 Sn이 남아 있지 않음을 확인하였다. 추가적으로 공정 온도 변화에 따른 Sn-30Ni TLPS 접합부의 계면반응 및 기계적 강도 시험이 수행되었다. TLPS 접합 공정 후접합부는 Ni-Sn 금속간화합물과 반응하고 남은 Ni 분말들로 구성되었으며, 접합 온도가 증가함에 따라 접합부 칩 전단강도는 증가하였다. 솔더링 온도와 유사한 270 oC의 접합 온도에서 30분 동안의 TLPS 접합 공정 수행 후 약 30 MPa의높은 칩 전단 강도 값을 얻었다.
Abstract
In this study, we have successfully fabricated the Sn-Ni paste and evaluated the bonding properties for hightemperature endurable EV (Electric Vehicle) power module applications. From evaluating of the micro-structural changes in the TLPS (Transient Liquid Phase Sintering) joints with Sn and Ni contents in the Sn-Ni pastes, a lack of Ni powders and Ni particle agglomerations by Ni surplus were observed in the Sn-20Ni and Sn-50Ni joints (in wt.%), respectively. In contrast, relatively dense microstructures are observed in the Sn-30Ni and Sn-40Ni TLPS joints. From differential scanning calorimetry (DSC) thermal analysis results of the fabricated Sn-Ni paste and TLPS bonded joints, we confirmed that the complete reactions of Sn with Ni to form Ni-Sn intermetallic compounds (IMCs) at bonding temperatures occurred, and there is no remaining Sn in the joints after TLPS bonding. In addition, the interfacial reactions and IMC phase changes of the Sn-30Ni joints under various bonding temperatures were reported, and their mechanical shear strength were investigated. The TLPS bonded joints were mainly composed of residual Ni particles and Ni3Sn4 intermetallic phase. The average shear strength tended to increase with increasing bonding temperature. Our results indicated a high shear strength value of approximately 30 MPa at a bonding temperature of 270 oC and a bonding time of 30 min.
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